for

Process for the production of ethanol from an acetic acid feed and a recycled ethyl acetate feed

The present invention produces ethanol in a reactor that comprises a catalyst composition and a feed stream comprising acetic acid and a recycled liquid stream comprising ethyl acetate. The catalyst composition comprises a first catalyst comprising platinum, cobalt, and/or tin and a second catalyst comprising copper. The crude ethanol product may be separated and ethanol recovered.




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Process for making ethanol from acetic acid using acidic catalysts

A process for selective formation of ethanol from acetic acid by hydrogenating acetic acid in the presence of a catalyst comprises a first metal on an acidic support. The acidic support may comprise an acidic support material or may comprise an support having an acidic support modifier. The catalyst may be used alone to produced ethanol via hydrogenation or in combination with another catalyst. In addition, the crude ethanol product is separated to obtain ethanol.




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Esterification process using extractive separation to produce feed for hydrogenolysis

Disclosed herein are processes for alcohol production by reducing an esterification product, such as ethyl acetate. The processes comprise esterifying acetic acid and an alcohol such as ethanol to produce an esterification product. The esterification product may be recovered using an extractive separation. The esterification product is reduced with hydrogen in the presence of a catalyst to obtain a crude reaction mixture comprising the alcohol, in particular ethanol, which may be separated from the crude reaction mixture.




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Catalysts and processes for producing butanol

A catalyst composition for converting ethanol to higher alcohols, such as butanol, is disclosed. The catalyst composition comprises at least one alkali metal, at least a second metal and a support. The second metal is selected from the group consisting of palladium, platinum, copper, nickel, and cobalt. The support is selected from the group consisting of Al2O3, ZrO2, MgO, TiO2, zeolite, ZnO, and a mixture thereof.




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Method for preparing menthone from isopulegol

The present invention relates to a method for preparing menthone, starting from isopulegol, using specific homogeneous catalysts.




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Method for producing 2-chloromethylbenzaldehyde, 2-chloromethylbenzaldehyde-containing composition, and method for storing same

A process for obtaining an industrially useful 2-chloromethylbenzaldehyde-containing liquid composition at a high yield is provided. More specifically, a process for producing 2-chloromethylbenzaldehyde comprising step (A) of mixing 1-dichloromethyl-2-chloromethylbenzene and sulfuric acid having a concentration of 84.5% by weight or more; and step (B) of mixing a mixture obtained in step (A) and water is provided.




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Protected aldehydes for use as intermediates in chemical syntheses, and processes for their preparation

A para-methoxy protected benzaldehyde useful in preparation of treprostinil, and of formula: (Formula (1)) is prepared by subjecting to Claisen re-arrangement a substituted benzaldehyde of formula (1a): (Formula (Ia)) to form the m-hydroxy-substituted benzaldehyde of formula (1b): (Formula (Ib)) and then reacting compound (1b) with a p-methoxybenzyl (PMB) compound to form a PMB-substituted benzaldehyde of formula (1).




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Apparatus for coproducting ISO type reaction products and alcohols from olefins, and method for coproducting them using the apparatus

The present invention relates to an apparatus for coproducting iso-type reaction product and alcohol from olefin, and a method for coproducting using the apparatus, in which the hydroformylation reactor provides a sufficient reaction area due to the broad contact surface area between the olefin and the synthesis gases that are the raw materials by a distributor plate installed in the reactor, and the raw materials can be sufficiently mixed with the reaction mixture due to the circulation of the reaction mixture so that the efficiency of the production of the aldehyde is excellent; and also the hydrogenation reactor suppresses the side reaction so that the efficiency for producing aldehyde and alcohol are all increased, and also iso-type reaction product and alcohol can be efficiently co-produced.




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Method for cultivation of Monarda fistulosa

A method for cultivating Monarda fistulosaincludes planting seeds at rates between about 2.5 and about 5 pounds per acre, preferably about 4 pounds per acre. Fuel costs are reduced because seeding, mowing the first season, and harvesting in seasons thereafter are all that is required. Reduction in herbicide use results from the heavy rate of planting, improved germination attributed to rolling, and the plant's natural herbicides which are more highly effective when seeded at the higher rate. The method includes seeding, mowing during a first growing season, and harvesting each season thereafter. This method results in oil without weed contamination and carvacrol levels are high.




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Process for producing phenol

In a process for producing phenol, cyclohexylbenzene is contacted with oxygen in the presence of an oxidation catalyst comprising a cyclic imide under oxidation conditions effective to produce a product comprising cyclohexylbenzene hydroperoxide and unreacted cyclic imide catalyst. At least a portion of the product is contacted with a cleavage catalyst under conditions effective to convert at least a portion of the cyclohexylbenzene hydroperoxide into a second product comprising further unreacted cyclic imide catalyst, phenol, and cyclohexanone. A portion of the further unreacted cyclic imide catalyst may then be removed from the second product and optionally recycled back to the oxidation step.




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Energy efficient method and apparatus for the extraction of lower alcohols from dilute aqueous solution

The present invention relates to the energy efficient and selective extraction of dilute concentrations of C2-C6 alcohols from an aqueous solution using liquid phase dimethyl ether.




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Method for producing phenylphosphonic acid metal salt composition, and crystal nucleating agent therefrom

A method for producing a phenylphosphonic acid metal salt composition, including reacting a phenylphosphonic acid compound (a) with a metal salt, metal oxide or metal hydroxide (b) that is present in an amount beyond the equivalent, the phenylphosphonic acid metal salt composition containing phenylphosphonic acid metal salt, and a surplus amount of the metal salt, the metal oxide or the surplus metal hydroxide (b). A crystal nucleating agent comprises the phenylphosphonic acid metal salt composition produced by the method.




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Method for preparing 3-trifluoromethyl chalcones

Disclosed is a method for preparing a compound of Formula 1 wherein Q and Z are as defined in the disclosure comprising distilling water from a mixture comprising a compound of Formula 2, a compound of Formula 3, a base comprising at least one compound selected from the group consisting of alkaline earth metal hydroxides of Formula 4 wherein M is Ca, Sr or Ba, alkali metal carbonates of Formula 4a wherein M1 is Li, Na or K, 1,5-diazabicyclo[4.3.0]non-5-ene and 1,8-diazabicyclo[5.4.0]undec-7-ene, and an aprotic solvent capable of forming a low-boiling azeotrope with water. Also disclosed is a method for preparing a compound of Formula 2 comprising (1) forming a reaction mixture comprising a Grignard reagent derived from contacting a compound of Formula 5 wherein X is Cl, Br or I with magnesium metal or an alkylmagnesium halide in the presence of an ethereal solvent, and then (2) contacting the reaction mixture with a compound of Formula 6 wherein Y is OR11 or NR12R13, and R11, R12 and R13 are as defined in the disclosure. Further disclosed is a method for preparing a compound of Formula 7 wherein Q and Z are as defined in the disclosure, using a compound of Formula 1 characterized by preparing the compound of Formula 1 by the method disclosed above or using a compound of Formula 1 prepared by the method disclosed above.




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Optical resolution methods for bicyclic compounds using asymmetric catalysts

An optically active bicyclic compound is efficiently produced by optical resolution using an optically active amine.




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Process for making polyglycerol ethers of fatty alcohols

Disclosed are processes relating to the production of polyglycerol ethers of fatty alcohols, in particular, one step process using fatty alcohol and glycerine to synthesize polyglycerides of fatty alcohols will provide a 100% renewable surfactant that is cost effective efficient and CMR free. The synthetic methods mentioned in prior art uses hazardous chemicals as glycidyl ethers, epichlorohydrin that are listed as CMR and known carcinogens and hazardous to handle.




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Process for the in situ production of polyether polyols based on renewable materials and their use in the production of flexible polyurethane foams

A polyether polyol based on renewable materials is obtained by the in situ production of a polyether from a hydroxyl group-containing vegetable oil, at least one alkylene oxide and a low molecular weight polyol having at least 2 hydroxyl groups. The polyol is produced by introducing the hydroxyl group-containing vegetable oil, a catalyst and an alkylene oxide to a reactor and initiating the alkoxylation reaction. After the alkoxylation reaction has begun but before the reaction has been 20% completed, the low molecular weight polyol having at least 2 hydroxyl groups is continuously introduced into the reactor. After the in situ made polyether polyol product having the desired molecular weight has been formed, the in situ made polyether polyol is removed from the reactor. These polyether polyols are particularly suitable for the production of flexible polyurethane foams.




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Method for the hydroxylation of phenols and phenol ethers

The present invention relates to a method for the hydroxylation of phenols and phenol ethers by means of hydrogen peroxide. The invention specifically relates to a method for the hydroxylation of phenol by means of the hydrogen peroxide. The method of the invention for the hydroxylation of a phenol or phenol ether by means of reacting said phenol or phenol ether with the hydrogen peroxide in the presence of an acid catalyst is characterized in that it includes mixing a phenol or phenol ether with a hydrogen peroxide solution in a mixing device under conditions enabling the conversion rate of the hydrogen peroxide to be minimized, and in that said reaction mixture is then placed in a piston flow reactor where the reaction leading to the production of the hydroxylated material takes place, the acid catalyst being fed into the mixing device and/or into the piston flow reactor.




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Process for production of hexamethylenediamine from carbohydrate-containing materials and intermediates therefor

Processes are disclosed for the conversion of a carbohydrate source to hexamethylenediamine (HMDA) and to intermediates useful for the production of hexamethylenediamine and other industrial chemicals. HMDA is produced by direct reduction of a furfural substrate to 1,6-hexanediol in the presence of hydrogen and a heterogeneous reduction catalyst comprising Pt or by indirect reduction of a furfural substrate to 1,6-hexanediol wherein 1,2,6-hexanetriol is produced by reduction of the furfural substrate in the presence of hydrogen and a catalyst comprising Pt and 1,2,6-hexanediol is then converted by hydrogenation in the presence of a catalyst comprising Pt to 1,6 hexanediol, each process then proceeding to the production of HMDA by known routes, such as amination of the 1,6 hexanediol. Catalysts useful for the direct and indirect production of 1,6-hexanediol are also disclosed.




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Process for heat integration in the hydrogenation and distillation of C3—C20-aldehydes

The present invention relates to a process for heat integration in the preparation of saturated C3-C20-alcohols, in which a hydrogenation feed comprising at least one C3-C20-aldehyde is hydrogenated in the presence of a hydrogen-comprising gas in a hydrogenation zone and a discharge is taken off from the hydrogenation zone and subjected to distillation in at least one distillation column to give a fraction enriched in saturated C3-C20-alcohols.




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Hydrogenation of styrene oxide forming 2-phenyl ethanol

A process for preparation of 2-phenyl ethanol by catalytic hydrogenation of styrene oxide using a catalyst consisting of Pd (II) on basic inorganic support is investigated. The present invention comprises development of new Pd based catalysts. The present method yields 2-phenyl ethanol in 98% selectivity at total conversion of styrene oxide. The present process represents an environment friendly alternative to conventionally used methods in industry and eliminates the reduction step for catalyst preparation. In the present invention the active catalyst is generated in situ during the hydrogenation of styrene oxide. In addition, Pd (II) supported catalysts do not catch fire (non pyrophoric), can be stored under ambient conditions and produce very less or no dust which makes said catalysts suitable for industrial application.




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Washing system for nitroaromatic compounds

A method of removing alkalinity and salt from a nitroaromatic product downstream of water washing to remove mineral acids and alkaline washing to remove salts of organic acids, comprises washing the product stream with an acidic aqueous solution, prior to the step of removing excess organic reactant, by steam stripping or distillation. Acid removed from the stripper or column is recycled back for use in the acidic washing. The acidic washing is done instead of the neutral washing step of the prior art. It removes residual salt and decreases the level of entrained colloidal water in the nitroaromatic product.




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Method for operating an internal combustion engine

A method for operating an internal combustion engine in which a speed-based feature of the internal combustion engine, which is correlated with an indicated mean effective pressure of the fuel, is determined during the warm-up of the internal combustion engine and an ideal fuel quantity, which is to be injected into at least one combustion chamber of the internal combustion engine during the warm-up, is ascertained therefrom.




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Method, apparatus and computer program for determining the location of a user in an area

Apparatus for orientating a user in a space wherein the space comprises a plurality of zones of which only certain zones constitute functional zones wherein each functional zone includes a first type device containing information relating to the position of the zone in the space and wherein the first type device is reactive to the presence of a second type device associated with the user to provide the user with the information to determine the orientation of the user in the space. A method of orientating the user within the space and guiding the user toward one or more features in the space is also disclosed.




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Dive computer incorporating stored dive site information

Dive computers in accordance with embodiments of the invention are disclosed that store information concerning a dive site. The stored information can be accessed during the dive to provide information concerning such things as points of interest and/or hazards. One embodiment of the invention includes a processor, memory connected to the processor, a pressure transducer connected to the processor and configured to measure depth, and a display connected to the processor. In addition, the memory contains factual information concerning a dive site, and the processor is configured to display at least a portion of the stored factual information concerning the dive site via the display.




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Method for governing a speed of an autonomous vehicle

A method of adjusting a speed of a mobile machine is provided. Image data of a location is collected where currently generated sensor data and previously generated sensor data indicate a discontinuity in sensor data. The image data is analyzed to determine if a non-motion blur score for the image data is above a threshold value. Then, a speed of the mobile machine is adjusted based on a determination that the non-motion blur score is above the threshold value.




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Apparatus for estimating travel path of a vehicle

An apparatus for estimating a travel path of a vehicle is mounted on the vehicle; and includes: an object detection device that detects an object lying ahead of the vehicle; a stationary object detection device that determines whether a detected object is a stationary object; a device that calculates an approximate straight line indicating a path of the stationary object from the temporal positional data for the stationary object projected on two-dimensional coordinates using a vehicle position as a starting point; a device that calculates a orthogonal line which passes through a midpoint in the temporal positional data for the stationary object and goes straight with respect to the approximate straight line on the two-dimensional coordinates; and a device that calculates a vehicle turning radius from an intersection point where the orthogonal line intersects with a x axis.




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Method for displaying suitability of future waypoint locations

A method for illustrating an aircraft flight plan comprising at least one waypoint on a flight display of a flight deck of an aircraft, where the method may include displaying on the flight display of the flight deck some type of display indicia that indicates the suitability of locations for future waypoints.




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System and method for automated updating of map information

Traffic information readings corresponding to a vehicle are received, the readings including at least a location. The traffic information readings are compared to information already within a map database, and are used to derive additional map information augmenting or correcting that already within the database, the additional map information subsequently being stored in the database. Additional information that is derived includes the presence of stop signs and traffic lights at intersections, the legality of turns at certain times of day, and the connectedness or non-connectedness of road segments.




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Method for car navigating using traffic signal data

There is a provided a method for car navigating using traffic signal data. The method for car navigating is characterized of providing an optimized route for the earliest arrival to destinations by using signal system data of one or more traffic signals existing on a certain route.




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Systems and methods for tracking location of movable target object

An automated process uses a local positioning system to acquire location (i.e., position and orientation) data for one or more movable target objects. In cases where the target objects have the capability to move under computer control, this automated process can use the measured location data to control the position and orientation of such target objects. The system leverages the measurement and image capture capability of the local positioning system, and integrates controllable marker lights, image processing, and coordinate transformation computation to provide tracking information for vehicle location control. The resulting system enables position and orientation tracking of objects in a reference coordinate system.




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Navigation system and methods for generating enhanced search results

A navigation system and various methods of using the system are described herein. Search query results are refined by the system and are prioritized based at least in part upon sub-search categories selected during the searching process. Sub-searches can be represented by graphical icons displayed on the user interface.




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Routing applications for navigation

Some embodiments provide a mapping application that provides routing information to third-party applications on a device. The mapping application receives route data that includes first and second locations. Based on the route data, the mapping application provides a set of routing applications that provide navigation information. The mapping application receives a selection of a routing application in the set of routing applications. The mapping application passes the route data to the selected routing application in order for the routing application to provide navigation information.




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Path information providing server, method of providing path information, and terminal

Provided are an apparatus and method of providing path information based on a status of a path and/or a purpose of the use of the path. A path information providing server collects environmental information from a sensing device. The path information providing server receives a path information request including a departure and a destination from a terminal device, and provides path information generated by mapping environmental data to a searched path.




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Method and apparatus for mapping buildings

An apparatus and method for determining an Absolute Location of an indoor stationary object, the method comprising: receiving a distance between an indoor stationary object and one or more predetermined spots; determining a location of stationary object relative to one of the predetermined spots; receiving an Absolute Location of one of the predetermined spots; determining an Absolute Location of the stationary object; and storing the Absolute Location of the stationary object with description information of the stationary object.




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Control system and method for hybrid vehicle

The present invention relates to a control system and a method for a hybrid vehicle which may optimally control the operating point of a vehicle. A control method for a hybrid vehicle includes detecting driving requests and a state of charge (SOC) of a battery when the vehicle is driving in HEV mode, determining a motor operating point and an engine operating point when the battery is in low SOC state, and compensating the motor operating point and the engine operating point by applying a climbing degree of the vehicle and the atmospheric pressure.




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Control device and control method for electric powered vehicle

In an electric powered vehicle in which vehicle driving force for reverse running is produced by a traction motor, vehicle driving force is set by a product of a base value set at least based on an accelerator opening and an amplification factor. The amplification factor is set at k1=1.0 during reverse running (V1.0 at the start of reverse running (V≧0) depending on the vehicular speed. The vehicle driving force at the start of reverse running can thereby be made larger than the vehicle driving force after the start of reverse running at the same accelerator opening.




for

Control device for hybrid vehicle

A control device for a hybrid vehicle includes a portion determining whether an engine torque is necessary, a portion controlling a motor to make a motor torque be a target torque, an engine rotation speed control portion controlling an engine output shaft to rotate at a target engine rotation speed for sudden start/reacceleration while the clutch being disengaged after starting the engine and before an actual rotation speed of the engine output shaft exceeds a reference target engine rotation speed in a case where the engine torque is necessary, a control portion engaging the clutch after the actual rotation speed exceeds the reference target engine rotation speed, and a portion controlling the engine so that the engine torque is assumed to be a target torque by canceling the control by the engine rotation speed control portion after the actual rotation speed exceeds the reference target engine rotation speed.




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Method and apparatus for alignment optimization with respect to plurality of layers

A method of patterning a plurality of layers of a work piece in a series of writing cycles in one or a plurality of write machines, the workpiece being deviced to have a number of N layers and layers of the workpiece having one or a plurality of boundary condition(s) for pattern position, the method comprising the steps of: determining the boundary conditions of layers 1 to N, calculating deviations due to the boundary conditions and calculating a compensation for the deviation of the first transformation added with the assigned part of the deviation due to the boundary conditions.




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Verification module apparatus for debugging software and timing of an embedded processor design that exceeds the capacity of a single FPGA

A plurality of Field Programmable Gate Arrays (FPGA), high performance transceivers, and memory devices provide a verification module for timing and state debugging of electronic circuit designs. Signal value compression circuits and gigabit transceivers embedded in each FPGA increase the fanout of each FPGA. Ethernet communication ports enable remote software debugging of processor instructions.




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Method and apparatus for creating and managing waiver descriptions for design verification

Methods are provided to facilitate automated creation and management of design rule checking or DRC waiver descriptions. Embodiments include receiving a plurality of first checksums corresponding to respective first geometric element violations waived in association with a block of an integrated circuit design, the first checksums being based on a first version of at least one design verification rule and/or of the block, receiving a second checksum corresponding to a second geometric element violation associated with the block, the second checksum being based on a second version of the design verification rule and/or of the block, determining whether the second checksum corresponds to at least one of the first checksums, and, if the second checksum does not correspond to at least one first checksum, generating a waiver request for the second geometric element error.




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System and method for automated simulator assertion synthesis and digital equivalence checking

A system, method, and computer program product for automatically generating equivalent assertions in different forms for different verification tools, which may be analog or digital. A user submits a set of logic assertions that, if unclocked, are converted to clocked assertions by generating and skewing clocks to ensure simulator uniformity. A stimulus is generated, perhaps at random, or input. A test bench is either input or synthesized. For each verification tool, the test bench is simulated and simulation results are captured. An assertion status difference engine evaluates result differences between the verification tools, and identifies and outputs differences indicating a significant inconsistency. Errors in verification tool implementation and user assertion coding can be detected. The simulators used may include SPICE and Verilog, or any other simulators that differ in type, simulation algorithm, input format, or vendor implementation.




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Physics-based reliability model for large-scale CMOS circuit design

This disclosure relates generally to systems and methods for simulating physical active semiconductor components using in silico active semiconductor components. To simulate charge degradation effect(s) in a circuit simulation, a simulated defect signal level is produced. More specifically, the simulated defect signal level simulates at least one charge degradation effect in the in silico active semiconductor component as a function of simulation time and a simulated input signal level of a simulated input signal. As such, the charge degradation effect(s) are simulated externally with respect to the in silico active semiconductor component. In this manner, the in silico active semiconductor component does not need to be reprogrammed in order to simulate charge degradation effects.




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Method and system for three-dimensional layout design of integrated circuit elements in stacked CMOS

A method includes providing a design of a semiconductor device such as a stacked CMOS device comprising a plurality of circuit elements to be assigned into a layout of a plurality of tiers, and identifying at least one first type of circuit element within the plurality of circuit elements based on at least one predetermined criterion. Each respective one of the at least one first type of circuit element is to be assigned to a respective designated one of the plurality of tiers. The method further includes dividing the remainder of the plurality of circuit elements into at least two groups of circuit elements based on circuit density, and assigning the at least one first type of circuit element and the at least two groups of circuit elements to respectively different ones of the plurality of tiers of the semiconductor device.




for

Scan chain modification for reduced leakage

A leakage power control vector is loaded into existing test scan chain elements for application to circuit elements of a circuit in which the leakage currents are to be controlled. The vector is designed to configure the circuit elements into states in which leakage currents are reduced. A multiplexer selects the power control vector for loading into the scan chain elements, and a clock generator clocks the configuration vector into the scan chain elements. A sleep mode detector may be provided to configure the multiplexer to select the power control vector and to operate the clock generator to clock the power control vector into the scan chain elements when a sleep mode of the circuit is detected.




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System and method for integrated transformer synthesis and optimization using constrained optimization problem

A method for designing a transformer in an integrated circuit includes receiving one or more desired characteristics of the transformer from user input and iteratively determining a design solution for the transformer through one or more simulations and modifications using a rule-set. The method combines the one or more desired characteristics with other preset characteristics of the transformer or the integrated circuit. A first model of the transformer is defined with typical load impedances and simulated having the combined characteristics to determine performance. Results of the simulation are processed to calculate performance with the load impedances specified by the user. The results are further processed to obtain a mathematical model that includes tuning capacitors. The first and subsequent models are modified by drawing on a rule-set of expert knowledge relating to general dependency of at least one design criterion, such as a physical, geometrical or performance characteristic, with another design criterion.




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Generating guiding patterns for directed self-assembly

Aspects of the invention relate to techniques of generating guiding patterns for via-type feature groups. A guiding pattern may be constructed for a via-type feature group that comprises two or more via-type features in a layout design. A backbone structure may then be determined for the guiding pattern. Based on the backbone structure and a self-assembly model, simulated locations of the two or more via-type features are computed. The simulated locations are compared with targeted locations. If the simulated locations do not match the targeted locations based on a predetermined criterion, the simulated locations adjusted to derive modified locations. Using the modified locations, the above operations may be repeated until the simulated locations match the targeted location based on a predetermined criterion or for a predetermined number of times.




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Integrated circuit floorplan for compact clock distribution

An integrated circuit includes core logic and a plurality of interface blocks disposed about a periphery of the core logic. A plurality of input or output (I/O) circuits is assigned to one of the plurality of interface blocks. The I/O circuits include external I/O circuits coupled to a device other than the integrated circuit and internal I/O circuits coupled to the integrated circuit. Each interface block includes a first plurality of I/O circuits disposed on a first side of the interface block and a second plurality of I/O circuits disposed on a second side of the interface block. Each interface block also includes interface logic for the interface block between the first plurality of I/O circuits and the second plurality of I/O circuits, and a logic hub that includes a clock distribution of minimal length that drives launch logic and capture logic to form the I/O circuits of the interface block.




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Method and system for forming patterns with charged particle beam lithography

In a method for fracturing or mask data preparation or mask process correction for charged particle beam lithography, a plurality of shots are determined that will form a pattern on a surface, where shots are determined so as to reduce sensitivity of the resulting pattern to changes in beam blur (βf). In some embodiments, the sensitivity to changes in βf is reduced by varying the charged particle surface dosage for a portion of the pattern. Methods for forming patterns on a surface, and for manufacturing an integrated circuit are also disclosed, in which pattern sensitivity to changes in βf is reduced.




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Method and system for semiconductor design hierarchy analysis and transformation

A method and apparatus for partitioning of the input design into repeating patterns called template cores for the application of reticle enhancement methods, design verification for manufacturability and design corrections for optical and process effects is accomplished by hierarchy analysis to extract cell overlap information. Also hierarchy analysis is performed to extract hierarchy statistics. Finally template core candidates are identified. This allows to the design to be made amenable for design corrections or other analyses or modifications that are able to leverage the hierarchy of the design since the cell hierarchy could otherwise be very deep or cells could have significant overlap with each other.




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Method and system for critical dimension uniformity using charged particle beam lithography

A method for mask data preparation or mask process correction is disclosed in which a set of charged particle beam shots is determined which is capable of forming a pattern on a surface, wherein critical dimension uniformity (CDU) of the pattern is optimized. In some embodiments the CDU is optimized by varying at least two factors. In other embodiments, model-based techniques are used. In yet other embodiments, the surface is a reticle to be used in an optical lithographic process to form a pattern on a wafer, and CDU on the wafer is optimized.