A respiratory mask or other sealing interface can be used in combination with a nasal cannula or other unsealing interface in providing respiratory therapies for the treatment of COPD or OSA. The mask can act as a pressure vessel over the top of a nasal cannula, with the intention of increasing expiratory pressure whilst allowing the nasal cannula to provide a user with breathing gases of a high humidity and temperature. The ability to selectively apply increased expiratory pressure may be effective in reducing a user's breathing rate and thus beneficial in the treatment of respiratory distress.

A patient monitoring system is configured to monitor oxygen saturation and/or oxygenation of a patient's blood. The system is configured to re-oxygenate the patient in response to a determination that the patient's oxygen saturation and/or oxygenation has fallen below a threshold (e.g., if the patient is experiencing hypoxemia). A re-oxygenation routine may include an initial step of rapidly oxygenating the patient, followed by a reduction of oxygenation to make the oxygenation process more gradual. For instance, after the initial step of rapid oxygenation, the patient may be oxygenated with oxygen at an atmospheric level. The system may dynamically adjust the ratio of delivered oxygen versus delivered air, the duration of oxygenation, and the incidence of oxygenation. The system may also adjust the automated delivery of one or more drugs to the patient based on the patient's condition and/or the state of re-oxygenation.

Methods, systems, and apparatuses are described that indicate an amount at which various gas flow rates should be manually adjusted in order to achieve targeted total flow rates and concentration levels.

The invention relates to a method for automatically adjusting a plurality of tunable passive antennas, for instance a plurality of tunable passive antennas of a radio transceiver using several antennas simultaneously. The invention also relates to an automatically tunable antenna array using this method. An automatically tunable antenna array of the invention has 4 user ports, and comprises: 4 tunable passive antennas, the 4 tunable passive antennas operating simultaneously in a given frequency band and forming a multiport antenna array; 4 sensing units; 4 feeders; a signal processing unit delivering a tuning instruction; and a tuning control unit, the tuning control unit receiving the tuning instruction from the signal processing unit, the tuning control unit delivering tuning control signals to the tunable passive antennas, the tuning control signals being determined as a function of the tuning instruction.

A device comprising: a receive antenna configured to receive a first radio-frequency (RF) signal having a first center frequency; a first transmit antenna configured to transmit a second RF signal having a second center frequency that is a harmonic of the first center frequency; a second transmit antenna configured to transmit a third RF signal having a third center frequency that is a harmonic of the first center frequency and is different from the second center frequency; first circuitry, coupled to the receive antenna and to the first transmit antenna, configured to generate the second RF signal using the first RF signal and provide it to the first transmit antenna for transmission; and second circuitry, coupled to the receive antenna and to the second transmit antenna, configured to generate the third RF signal using the first RF signal and provide it to the second transmit antenna for transmission.

Aspects of the subject disclosure may include, for example, an antenna structure having a feed point for coupling to a dielectric core of a cable that propagates electromagnetic waves without an electrical return path, and a dielectric antenna, substantially or entirely devoid of conductive external surfaces, coupled to the feed point, the dielectric antenna facilitating receipt, at the feed point, the electromagnetic waves for propagating the electromagnetic waves to an aperture of the dielectric antenna for radiating a wireless signal. Other embodiments are disclosed.

Aspects of the subject disclosure may include, for example, a transmission device that includes a transmitter that generates a first electromagnetic wave to convey data. A coupler couples the first electromagnetic wave to a single wire transmission medium having an outer surface, to forming a second electromagnetic wave that is guided to propagate along the outer surface of the single wire transmission medium via at least one guided wave mode that includes an asymmetric or non-fundamental mode having a lower cutoff frequency. A carrier frequency of the second electromagnetic wave is selected to be within a limited range of the lower cutoff frequency, so that a majority of the electric field is concentrated within a distance from the outer surface that is less than half the largest cross sectional dimension of the single wire transmission medium, and/or to reduce propagation loss. Other embodiments are disclosed.

Reconfigurable antennas in an ad-hoc network are provided where all nodes employ MIMO/SIMO/MISO communication techniques. Three types of reconfigurable antennas: Reconfigurable Printed Dipole Array (RPDA), Reconfigurable Circular Patch Antenna (RCPA) and Two-Port Reconfigurable CRLH Leaky Wave Antennas are used. The RPDA, RCPA and the CRLH Leaky Wave antennas have a different number of configurations as well as different degrees of pattern diversity between possible configurations. To effectively use these antennas in a network, the performance of centralized and decentralized antenna configuration selection schemes are quantified for reconfiguration at one or both link ends. The sum capacity of the network is used as a metric to quantify the performance of these antennas in measured and simulated network channels.

A method and apparatus for angularly aligning an antenna disposed at a geographical location is disclosed. A corresponding apparatus comprises a plurality of reticle members, each reticle member having a reticle, and a plurality of reference members, each adjustably engaged with an associated one of the plurality of reticle members, wherein each of the plurality of reference members comprises an associated template having a reference mark positioned thereon according to the geographical location of the antenna and the antenna is angularly aligned when each reference mark of each template is aligned with the reticle associated with the reference mark. A corresponding method comprises the steps of affixing an associated template having a reference mark positioned thereon according to the geographic location of the antenna to each of the plurality of reference members and angularly aligning each of the plurality of reticle members with each reference mark of each associated template.

Various systems and methods for radiating RF transmissions outside of a portable electronic device with a conductive case. In an embodiment, this solution includes a conductive enclosure, a circuit board within the conductive enclosure, at least one non-conductive gap between the circuit board and the conductive enclosure, and a radio frequency (RF) connection between the circuit board and the conductive enclosure. The combination of enclosure and gaps can excite certain radiation modes at high frequency bands, such as a cavity-backed lambda-long slot radiation mode.

Techniques and mechanisms to provide satellite communication functionality with an antenna assembly. In an embodiment, a communication device includes an antenna panel (comprising one or more holographic antenna elements), a housing and hardware interfaces which facilitate operation of the communication device has a module of the antenna display. A cross-sectional profile of the housing may conform to a polygon other than any rectangle. A configuration of the housing and hardware interfaces may facilitate the formation of an antenna assembly arrangement other than that of any rectilinear array. In another embodiment, communication devices of the antenna assembly each conform to a triangle or a hexagon.

Techniques and mechanisms to provide a motor vehicle with connectivity for satellite communications. In an embodiment, a communication device is disposed between an exterior surface of the motor vehicle and an interior surface of the motor vehicle. An antenna panel, disposed in a housing of the communication device, may be configured to participate in satellite communication via a first side of the communication device. A configuration of the antenna panel, the housing or one or more hardware interfaces of the communication device may facilitate low profile solution for such communication with the satellite. In another embodiment, the one or more hardware interfaces are each disposed on a respective side of the housing other than the first side, the one or more hardware interfaces to couple the communication device to a power supply of a motor vehicle.

A device comprising a plurality of metallic conical radiators, said conical radiators substantially hollow having a vertex end and a base end, a first cylindrical portion disposed annularly about the base end of the conical portion, a metallic second cylindrical portion coupled to the vertex of the conical portion, said cylindrical portion having a threaded aperture, and an antenna feed coupled to the threaded aperture. The device may have patches disposed on a substrate as a one or multi-dimensional array. An RF feed may be coupled to the radiators.

A method of manufacturing a thin-film transistor includes forming an oxide semiconductor on a substrate, stacking an insulating layer and a metal layer on the substrate to cover the oxide semiconductor, forming a photosensitive pattern on the metal layer, forming a gate electrode by etching the metal layer using the photosensitive pattern as a mask, where a part of the gate electrode overlaps a first oxide semiconductor region of the oxide semiconductor, forming a gate insulating film by partially etching the insulating layer using the photosensitive pattern as a mask, where the gate insulating film includes a first insulating region with a first thickness under the photosensitive pattern and a second insulating region with a second thickness less than the first thickness, and performing plasma processing on the gate insulating film so that a second oxide semiconductor region of the oxide semiconductor under the second insulating region becomes conductive.

A compensation film includes an elongation film having an elongation rate of greater than or equal to about 200% in a uniaxial direction and having a surface energy of about 40 mJ/m2 to about 65 mJ/m2 and a liquid crystal layer disposed on one side of the elongation film and including liquid crystals.

An LCD with switchable viewing angle includes a first substrate, second substrate, and a liquid crystal layer. The first substrate is provided with a first electrode and a second electrode. In an embodiment, the first electrode is a pixel electrode, and the second electrode is a common electrode. The second substrate is provided with a third electrode. Liquid crystal molecules in the liquid crystal layer are positive liquid crystal molecules. When a first bias voltage is applied to the third electrode, the LCD is displayed with a wide viewing angle; and when a second bias voltage greater than the first bias voltage is applied to the third electrode, the LCD is displayed with a narrow viewing angle.

A liquid crystal display (LCD) panel, a display device and a fabrication method of the LCD panel are provided. The LCD panel comprises a first substrate, a second substrate opposite to the first substrate, a liquid crystal (LC) layer sandwiched between the first substrate and the second substrate, a first alignment layer disposed on the first substrate, and a second alignment layer disposed on the second substrate. The first alignment layer is in contact with the LC layer and provides a first pre-tilt angle α to LC molecules in the LC layer, and the second alignment layer is in contact with the LC layer and provides a second pre-tilt angle β to the LC molecules in the LC layer, where α>β.

The disclosure provides a liquid crystal display panel, an array substrate and a manufacturing method thereof. In the method, controllable resistance spacer layers are formed on at least one of a source doped region and a drain doped region of a low temperature polysilicon active layer, wherein when a turn-on signal is not applied to the gate layer, the controllable resistance spacer layers serve as a blocking action for a flowing current, and when the turn-on signal is applied to the gate layer, the controllable resistance spacer layers serve as a conducting action for the flowing current, such that a contact region formed of the controllable resistance spacer layers is connected the corresponding source layer and the corresponding drain through the controllable resistance spacer layers. Therefore, the disclosure is capable of effectively decreasing a leakage of a thin film transistor.

A semiconductor device includes a substrate, a first thin film transistor supported on the substrate and having a first active layer that primarily contains a first oxide semiconductor, and second thin film transistor supported on the substrate and having a second active layer that primarily contains a second oxide semiconductor with a higher mobility than the first oxide semiconductor. The first active layer and the second active layer are positioned on the same insulating layer and contact the same insulating layer.

A display apparatus may include a display panel, a touch electrode, a connecting pad, a first inorganic insulation layer, and a second inorganic insulation layer. The display panel may display an image according to image data. The touch electrode and the connecting pad may be formed of the same conductive material and may be spaced from each other. The first inorganic insulation layer may be positioned between the display panel and the touch electrode and may directly contact each of the touch electrode and the connecting pad. The second inorganic insulation layer may directly contact each of the first inorganic insulation layer and the touch electrode. The touch electrode may be covered by the second inorganic insulation layer. The connecting pad may be positioned between two portions of the second inorganic insulation layer and have a side not covered by the second inorganic insulation layer.

A liquid crystal display device includes first and second substrates, liquid crystal layer, and first and second spacer sections. The first substrate has a first surface including a light-shielding region in a lattice form and a plurality of opening regions surrounded by the light-shielding region. The light-shielding region includes a plurality of first extended portions extending in a first direction and a plurality of second extended portions extending in a second direction that intersects the first direction. The first substrate has a plurality of transistors formed thereon. The second substrate has a second surface that is opposed to and spaced from the first surface. The liquid crystal layer is arranged between the first and second surfaces. The first spacer section has long sides oriented in the second direction, and the second spacer section has long sides oriented in the first direction. The spacer sections protrude into the liquid crystal layer.

A method of forming a front frame of an LCD includes: providing a rectangle frame; disposing bending lines on the side frames of the rectangle frame; adhering a layer of buffering material to the part of the side frame that is on the inner side of the bending line, where the part of the side frame that is on the inner side of the bending line refers to the part of the side frame that is between the bending line and the inner edge of the side frame; and stamping and bending the rectangle frame along the bending line. The present invention can align the layer of buffering material with the inner edge of the side frame so that the layer of buffering material does not extend to the open area of the front frame, therefore does not affect the display of the liquid crystal panel.

According to one embodiment, a display device includes a liquid crystal display panel, a cover panel on a display surface of the liquid crystal display panel, a backlight unit opposed to the liquid crystal display panel, a case covering the backlight unit and the liquid crystal display panel, and including at least a part fixed to the cover panel, and an adhesive provided on the cover panel along the liquid crystal display panel. The adhesive includes a surface opposite to the cover panel, a first area on the surface, and a second area on the surface, located on an inner side closer to the liquid crystal display panel than the first area. The part of the case is adhered to the second area.

According to one embodiment, a display device includes a cover panel, a display panel opposed to the cover panel, an adhesive layer provided between the cover panel and the display panel and attaching the display panel to the cover panel, the adhesive layer including a first area to which the display panel is fixed and a second area located further outward than an outer periphery of the display panel, a backlight unit opposed to the display panel, and a case containing the display panel and the backlight unit, at least a part of the case being fixed to the cover panel by the second area of the adhesive layer.

A liquid crystal display (LCD) is presented. The LCD includes: a substrate; a plurality of thin film transistors disposed on the substrate; a plurality of liquid crystal (LC) layers disposed within a plurality of microcavities on the substrate; a partition wall disposed between the LC layers adjacent in a first direction; and signal lines disposed between the LC layers and the partition wall and connected to the plurality of thin film transistors.

A liquid crystal display includes a display panel, an opposite display panel, a liquid crystal layer between the display panel and the opposite display panel. The display panel includes a first base substrate, a pretilt alignment stabilization layer including a polymer of a reactive mesogen, a first vertical alignment layer including a decomposition product of a polymerization initiator between the first base substrate and the pretilt alignment stabilization layer, and a pattern electrode between the first base substrate and the first vertical alignment layer. The opposite display panel includes a second base substrate, a patternless electrode on the second base substrate, and a second vertical alignment layer on the patternless electrode, which includes the decomposition product of the polymerization initiator. The liquid crystal layer includes a liquid crystal composition having negative dielectric anisotropy. A surface of the LCD that faces a viewer has a concave shaped curve.

The present disclosure provides a method for rubbing an alignment layer on a substrate with a plurality of spacers that are arranged in rows and columns and a liquid crystal display panel. The method includes: determining a first rubbing direction and a second rubbing direction in such a manner that the second rubbing direction is an arrangement direction of liquid crystal molecules when the liquid crystal molecules are arranged correctly on the alignment layer, and an angle between the first rubbing direction and the second rubbing direction is greater than or equal to arctan (b/a), where a represents a row pitch between the spacers and b represents a width of one spacer; performing a first rubbing on the alignment layer in the first rubbing direction; and performing a second rubbing on the alignment layer in the second rubbing direction. The second rubbing direction is different from the first rubbing direction.

An array substrate and a method of fabricating the same are disclosed. The method has the following steps of: fabricating a switch array layer on a substrate; forming a color resist layer having a red color filter, a green color filter and a blue color filter on the switch array layer, and a through hole in the color resist layer; forming a transparent conductive layer on the color resist layer; and forming a light shield layer on the transparent conductive layer.

An electronic device includes, a light source having a peak emission at a wavelength between about 440 nm to about 480 nm; and a photoconversion layer disposed on the light source, wherein the photoconversion layer includes a first quantum dot which emits red light and a second quantum dot which emits green light,wherein at least one of the first quantum dot and the second quantum dot has a perovskite crystal structure and includes a compound represented by Chemical Formula 1: AB'X3+α Chemical Formula 1 wherein A is a Group IA metal, NR4+, or a combination thereof, B' is a Group IVA metal, X is a halogen, BF4−, or a combination thereof, and α is 0 to 3.

A liquid-crystal display (LCD) device includes: an array substrate on which a sub-pixel is disposed; a color filter substrate on which a color filter corresponding to the sub-pixel is disposed; and a liquid-crystal layer between the array substrate and the color filter substrate. The array substrate comprises a lens hole, the color filter substrate comprises a lens hole guide, and a diameter of the lens hole is smaller than an inner diameter of the lens hole guide.

A single molecule sensing or detecting device includes a first electrode and a second electrode separated from the first electrode by a gap. The first electrode and the second electrode have an opening formed therethrough. At least one of the first electrode and the second electrode is functionalized with a recognition molecule. The recognition molecule has an effective length L1 and is configured to selectively bind to a target molecule having an effective length L2. The size of the gap is configured to be greater than L2, but less than or equal to the sum of L1 and L2.

The purpose of the present invention is to provide an In—Cu alloy sputtering target member having high compositional homogeneity in the thickness direction. The present invention provides a sputtering target member having a composition containing from 1 to 70 at. % of Cu relative to a total number of atoms of In and Cu, the balance being In and inevitable impurities, wherein the target member fulfills 0.95≦A/B≦1, where A represents a Cu atomic concentration relative to the total number of atoms of In and Cu in one half of a thickness direction; B represents a Cu atomic concentration relative to the total number of atoms of In and Cu in the other half of the thickness direction; and B≧A; and wherein a number of pores having a size of 100 μm or more is less than 10/cm2 on average.

Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas and a reagent gas into an exhaust conduit of a substrate processing system; injecting a non-reactive gas into the exhaust conduit to maintain a desired pressure in the exhaust conduit for conversion of the exhaust gas; and forming a plasma from the exhaust gas and reagent gas, subsequent to injecting the non-reactive gas, to convert the exhaust gas to abatable byproduct gases.

The invention discloses a composite material used for catalyzing and degrading nitrogen oxide and its preparation method and application thereof. The invention of the hollow g-C3N4 nanospheres/reduced graphene oxide composite-polymer carbonized nanofiber material is prepared as follow: 1) the preparation of silica nanospheres; 2) the preparation of hollow g-C3N4 nanospheres; 3) the preparation of graphene oxide; 4) the preparation of surface modified hollow g-C3N4 nanoparticles preparation; 5) the preparation of composites; 6) the preparation of composite-polymer carbon nanofiber material. The raw materials used in the process is low cost and easy to get; the operation of the invention is simple and convenient without the use of expensive equipment in the whole process; the composite has high adsorption efficiency of ppb level nitrogen oxide with good repeatability.

Microfluidic devices having an electrowetting configuration and an optimized droplet actuation surface are provided. The devices include a conductive substrate having a dielectric layer, a hydrophobic layer covalently bonded to the dielectric layer, and a first electrode electrically coupled to the dielectric layer and configured to be connected to a voltage source. The microfluidic devices also include a second electrode, optionally included in a cover, configured to be connected to the voltage source. The hydrophobic layer features self-associating molecules covalently bonded to a surface of the dielectric layer in a manner that produces a densely-packed monolayer that resists intercalation and or penetration by polar molecules or species. Also provided are microfluidic devices having an electrowetting configuration that further include a section or module having a dielectrophoresis configuration; systems that include any of the microfluidic devices in combination with an aqueous droplet and a fluidic medium immiscible with the medium of the aqueous droplet; related kits; and methods of manipulating droplets, optionally containing micro-objects such as biological cells, within the microfluidic devices.

Methods are provided for production of a composite layer comprising a plastic foil and a layer deposited directly thereon. A method for production of a composite layer comprising a plastic foil and at least one layer deposited directly onto the plastic foil by means of chemical gas-phase deposition within a vacuum chamber may be provided, wherein the plastic foil has a proportion of at least 20 percent by mass of a metal element or of a semiconductor element, wherein during the layer deposition, at least one monomer is supplied into the vacuum chamber and a plasma is formed within the vacuum chamber. After completed deposition of the layer, at least one surface region of the layer is exposed to accelerated electrons.

For coating substrates (S) having along their surfaces to be coated high aspect ratio vias, a sputtering system has a sputtering source arrangement, which includes a first DC pulse operated magnetron sub-source (1203) and a second frame-shaped magnetron sub-source (1213) which latter is arranged, in the system, between the substrate (S) and the first magnetron sub-source (1203). The second magnetron sub-source (1213) may be operated in DC, pulsed DC, thereby also HIPIMS mode. The first magnetron sub-source (1203) is advantageously also operated in HIPIMS mode. The substrate (S) is biased by an Rf power source (1253).

An Al—Te—Cu—Zr alloy sputtering target, comprising 20 at % to 40 at % of Te, 5 at % to 20 at % of Cu, 5 at % to 15 at % of Zr and the remainder of Al, wherein a Te phase, a Cu phase and a CuTe phase are not present in a structure of the target. An object of the present invention is to provide an Al—Te—Cu—Zr alloy sputtering target capable of effectively reducing particle generation, nodule formation and the like upon sputtering and further capable of reducing oxygen contained in the target.

A film is sputter-deposited on an essentially plane, extended surface of a substrate which has recesses therein, namely at least one of grooves, of holes, of bores, of vias, of trenches. So as to establish on one hand a homogeneous thickness distribution of the film along the addressed surface of the substrate and, on the other hand, a thick film deposition within the recesses, sputter deposition is performed first at a large distance between a sputter surface of a target and the addressed surface of the substrate and then at a reduced distance between the addressed surfaces.

The present disclosure relates to a method for producing a reference electrode, wherein an internal space of the reference electrode is delimited by an outer wall and wherein the internal space contains a reference electrolyte up to a specified height, wherein the reference electrode is introduced into a pressurization chamber, wherein a defined overpressure is applied to the pressurization chamber and, via an opening that is located above the specified height in the outer wall of the reference electrode to the internal space of the reference electrode, and wherein the opening in the outer wall of the reference electrode is closed at the defined overpressure . The present disclosure further relates to a device for carrying out the method.

The concentration measurement method includes: introducing a predetermined amount of the biological sample into the capillary; measuring a temperature of the biological sample by applying a first voltage to the electrode unit when the temperature of the biological sample is measured, the first voltage allowing the temperature measurement to be less affected by increase and reduction in an amount of the analyte contained in the biological sample; measuring the concentration of the analyte contained in the biological sample by applying a second voltage to the electrode unit; measuring an environmental temperature in a surrounding of the biological sample; and correcting the concentration of the measured analyte based on the measured temperature of the biological sample and the measured environmental temperature.

The present invention generally relates to devices and methods for containing molecules. In some embodiments, the device comprises a nanopore, a pore, and a cavity capable of entropically containing (e.g., trapping) a molecule (e.g., a biomolecule), e.g., for minutes, hours, or days. In certain embodiments, the method comprises urging a molecule into a cavity of a device by application of an electric field, and/or by deposition of fluids having different ionic strengths. The molecule may comprise, in some cases, nucleic acids (e.g., DNA). The molecule, when present in the cavity and/or the nanopore, may be capable of being analyzed, determined, or chemically modified. In some instances, a second molecule (e.g., a second molecule which interacts the first molecule) may also be urged into the cavity. In some embodiments, the interaction of the second molecule with the first molecule (e.g., the second molecule binding to or chemically modifying the first molecule) may be determined by, for example, a change in voltage measured across the device.

In one aspect, a biological sequencing device comprising a cartridge configured to be removed from the instrument is disclosed. In various embodiments the cartridge can include one or more capillaries suitable for capillary electrophoresis, a reservoir and a pump. In various embodiments the reservoir can contain a separation matrix. In various embodiments the pump can load a capillary with separation matrix. In another aspect the biological sequencing device can include one or more capillaries and an integrated valve assembly. In various embodiments the integrated valve assembly can provide a polymer to the one or more capillaries.

A Cu—Ga alloy sputtering target includes, as a component composition, Ga: 0.1 to 40.0 at % and a balance including Cu and inevitable impurities, in which a porosity is 3.0% or lower, an average diameter of circumscribed circles of pores is 150 μm or less, and an average crystal grain size of Cu—Ga alloy particles is 50 μm or less.

Methods and apparatus for processing a substrate are disclosed herein. In some embodiments, a process chamber includes: a chamber body defining an interior volume; a substrate support to support a substrate within the interior volume; a plurality of cathodes coupled to the chamber body and having a corresponding plurality of targets to be sputtered onto the substrate; and a shield rotatably coupled to an upper portion of the chamber body and having at least one hole to expose at least one of the plurality of targets to be sputtered and at least one pocket disposed in a backside of the shield to accommodate and cover at least another one of the plurality of targets not to be sputtered, wherein the shield is configured to rotate about and linearly move along a central axis of the process chamber.

A sputtering system that includes a sputtering chamber having a target material serving as a cathode, and an anode and a work piece. A direct current (DC) power supply supplies electrical power to the anode and the cathode sufficient to generate a plasma within the sputtering chamber. A detection module detects the occurrence of an arc in the sputtering chamber by monitoring an electrical characteristic of the plasma. In one embodiment the electrical characteristic monitored is the impedance of the plasma. In another embodiment the electrical characteristic is the conductance of the plasma.

Water is flowed inside main body section formed from an insulating material such that a specified space remains inside the main body section. Electrodes and are arranged along the outer walls of the main body section and voltage is applied to the electrodes. Processing gas present inside the main body section is plasmarized and plasma is emitted to the water flowing inside the main body section.

In an ozone generating system which performs intermittent operation, that is, an operation in an ozone generating operation period in which ozone is generated by discharging gas including oxygen at a discharge electrode part and an operation in an ozone generating operation standby period in which ozone is not generated by stopping discharge are alternately repeated, a gas circulating device which circulates gas in the ozone generating apparatus and removes at least nitric acid from the gas which is circulated is connected to the ozone generating apparatus.

Methods and apparatus for processing substrates are provided herein. In some embodiments, a physical vapor deposition chamber includes a first RF power supply having a first base frequency and coupled to one of a target or a substrate support; and a second RF power supply having a second base frequency and coupled to one of the target or the substrate support, wherein the first and second base frequencies are integral multiples of each other, wherein the second base frequency is modified to an offset second base frequency that is not an integral multiple of the first base frequency.

A film formation apparatus and a film-formed workpiece manufacturing method which are capable of forming a film with a uniform thickness on a workpiece like a three-dimensional object that includes a plurality of surfaces by a simple structure are provided. A film formation apparatus includes a target 21 that is a film formation material including a plane SU3, a power supply unit 3 applying power to the target 21, a rotating unit 4 rotating a workpiece W that is a film formation object around a rotation axis AX1, and a revolving unit 5 revolving the rotating unit 4 around a revolution axis AX2 separate from the rotation axis AX1 to repeatedly make the workpiece W to come close to and move apart from the target 21.