A high-pressure discharge lamp having an arc tube with a casing made of glass. The arc tube includes a light-emitting part and sealing parts connected to the light-emitting part. A pair of electrode rods are disposed within the glass casing such that their tips face each other with a gap therebetween and project into the discharge space, and their base ends are embedded in the sealing parts and overlap surfaces of metal foils provided in the sealing parts. Each base end is coated with a coating foil made of metal and having a C-like cross section with a slit formed between edges thereof. An end of the coating foil farthest from the light-emitting part is located closer to the light-emitting part than an end of the metal foil closest to the light-emitting part.

Disengageable chair-lift station having a transfer way made up of a first longitudinal part extending in alignment with the line of the carrying-hauling cable, and of a second transversal part extending perpendicular to the first part. The driving or return pulley is placed between the sections of the first part, and the disembarkation and embarkation platforms are shifted from one another in the second part, so that the disembarkation and embarkation of the skiers are performed on the same side of the station, in a direction perpendicular to the longitudinal axis of the line.

An elongated flexible open coil spring with spaced apart coils adapted to engage a guide pin on a slot car is placed in the slot of a model slot car track. Cars are positioned with their depending pins engaging the open coil spring to be carried around the track by a powered car held by and moving the open coil spring along the slot.

Inductrack III configurations are suited for use in transporting heavy freight loads. Inductrack III addresses a problem associated with the cantilevered track of the Inductrack II configuration. The use of a cantilevered track could present mechanical design problems in attempting to achieve a strong enough track system such that it would be capable of supporting very heavy loads. In Inductrack III, the levitating portion of the track can be supported uniformly from below, as the levitating Halbach array used on the moving vehicle is a single-sided one, thus does not require the cantilevered track as employed in Inductrack II.

Proposed is a device for coating substrates by means of high-velocity flame spraying. The device comprises a combustion chamber (4), a first fuel feeder (L1) for feeding a liquid or gaseous fuel as well as at least one gas feeder for feeding an oxidative gas. The devise comprises furthermore a second fuel feeder (L5) for feeding a liquid or gaseous fuel as well as at least one further gas feeder for feeding a gas. Both the first gas feeder and the two fuel feeders (L1, L5) port into a common combustion chamber (4). In addition, means 24, 28 are provided for independent control of the fuel feed into the two fuel feeders (L1, L5).

In order to improve a high-pressure cleaning apparatus comprising a pump unit adapted to be driven by motor, a first connection element for detachable connection to a liquid supply conduit, said first connection element being connected to the suction side of the pump unit, and a second connection element for detachable connection to a high-pressure conduit, said second connection element being connected to the pressure side of the pump unit, such that it can be handled in a more user-friendly manner, the invention proposes that the first connection element and/or the second connection element be oriented in a direction facing upward away from a supporting surface for the high-pressure cleaning apparatus.

The disclosure encompasses in-line reactive condensation processes via vapor phase esterification of bio-oil to decease reactive species concentration and water content in the oily phase of a two-phase oil, thereby increasing storage stability and heating value. Esterification of the bio-oil vapor occurs via the vapor phase contact and subsequent reaction of organic acids with ethanol during condensation results in the production of water and esters. The pyrolysis oil product can have an increased ester content and an increased stability when compared to a condensed pyrolysis oil product not treated with an atomized alcohol.

Formulations for solvent-based flexographic or rotogravure inks, which are capable high-quality, defect-free printing at high speeds, contain flexographic ink resins solutions and solvent mixtures which are designed to maintain a dynamic solubility parameter in the ink as the dry state is approached during the printing process. The inks described show extremely high quality printing at linear press speeds above 1800 fee per minute (ca 0.549 km/min).

A system and method of reducing the net carbon dioxide footprint of an industrial process that generates power from the combustion of hydrocarbon fuels in which ambient air is admixed with up to 50% by volume of an effluent gas from the power generator of the industrial process, in order to substantially increase the CO2 concentration in the air prior to treatment. The treatment comprises adsorbing CO2 from the admixed ambient air utilizing a cooled, porous substrate-supported amine adsorbent, wherein the porous substrate initially contacts the mixed ambient air containing condensed water in its pores, which act as an intrinsic coolant with respect to the exothermic heat generated by the adsorption process. In addition, prior to regenerating the supported adsorbent, air pressure is substantially reduced in the sealed regeneration chamber and the low pressure chamber is placed in fluid connection with a higher pressure regeneration chamber containing steam and carbon dioxide, to preheat the sorbent to be regenerated and to quickly cool the regenerated sorbent prior to use for further CO2 adsorption.

A tool is provided for moving a first clamping or gripping member toward or away from a second facing clamping or gripping member, the tool having a double threaded drive shaft coupled to opposed threaded linkage driving members for causing the threaded linkage driving members to be driven toward or away from each other. As the threaded linkage driving members move closer, the resulting angle of the links becomes steeper, thus increasing the mechanical advantage of the clamping tool, enhancing clamping forces. A beneficial result is a clamping apparatus that requires less manual energy than a traditional clamp. Another beneficial result is provided if the same amount of energy is applied to the driveshaft as in a traditional clamp, the resulting clamping force is significantly higher. If the second clamping member is adjustable, it accommodates wide variations in thickness of an object positioned between the first and second clamping members.

Method for production of cellulose and hemicellulose fibers from lignocellulose biomass obtained from sugarcane leaves and buds by applying a process comprising the stages of: a) Diminishing the particle size of the lignocellulose biomass to a range between 3 and 15 mm, b) Subjecting the product obtained to treatment with one or more solvents and/or a mixture of specific catalysts, c) Carry out sudden decompression to an atmospheric pressure, d) Collecting the pretreated material in a cyclone, e) Optionally separating the liquid and solid fractions through washing and filterung f) Optionally, treating the solid fraction in a reactor with a mixture of ethanol and chlorine dioxide, d) Wash the product obtained to achieve cellulose efficiency above 50% and of lignin of 5 to 7%, fiber lengtht in a range to 1,5 to 2,7 mm, breaking length (km) of 7,0 -8,9, Burst index (kPam2/g) of 4,5-7,2 and Tear index (mNm2/g) of 8,2-8, The obtained high-resistance cellulose and hemicellulose is especially suitable for the paper production and polymer-type plastics.

Compositions and methods related to new wet strength resins are provided. By using functionally-symmetrical cross-linkers and mono-functional modifiers, and separating the steps of reacting a prepolymer with the cross-linkers from the reaction of intermediate cross-linked prepolymer with epichlorohydrin, new wet strength resin products are provided having improved properties.

A high-pressure homogenizer including: a fixed body (7) housing a rotating crankshaft (10);a motor (3) for driving the crankshaft (10);a reduction gear unit (4) interconnected between the crankshaft and transmission elements (5, 6), characterized in that the reduction gear unit (4) is an epicyclic reduction gear unit. Preferably there is provided a lubricant feed line (15) which passes through the fixed body and reaches the epicyclic reduction gear unit (4). Preferably the epicyclic reduction gear unit (4) is constructed integrally with the fixed body (4).

An electrochemical energy storage device includes a cathode, an anode, and an electrolyte disposed between the cathode and the anode. The anode includes a capacitive material as a majority component, and further includes an electrochemically active material as a minority component, such that an operating potential of the anode is configured according to a reaction potential of the electrochemically active material.

Methods are provided for cooling data centers based on a cooperative system including a plurality of Indirect Air-Side Economizers, also referred to as Recirculation Air Cooling Units, that are advantageously operated in conjunction with one or more Side Stream Filtration Units or filters inclusive to a portion of the IASE/RACUs, and one or more Make-Up Air Dehumidification/Humidification Units for the introduction of ventilation air and control of humidity within the enclosed space. An objective of the systems and methods according to this disclosure is to provide the necessary rejection of heat, removal of particulate from the air, and control of the absolute moisture content of the air within a data center.

A cooling system has a cabinet and a plurality of separate cooling stages including an upstream cooling stage and a downstream cooling stage. At least the upstream cooling state is a variable capacity cooling stage. Each cooling stage has a cooling circuit. Evaporators of the cooling circuits are arranged in the cabinet so that air passes over them in serial fashion. A controller when a Call for Cooling first reaches a point where cooling is needed, operating the upstream cooling circuit to provide cooling and not the downstream cooling circuit. When the Call for Cooling has increased to a second point, the controller additionally operates the downstream cooling circuit to provide cooling. The cooling capacity at which the upstream cooling circuit is being operated is less than its full capacity when the Call for Cooling reaches the second point.

A port of a first device includes remote device detection logic to detect, on a link, a remote second device, determine, from a voltage generated at the port, whether the second device is direct current (DC)-coupled or alternating current (AC)-coupled to the link, and select one of first settings or second settings to be applied at the port in communications over the link with the second device based on whether the second device is DC-coupled or AC-coupled.

This disclosure generally relates to high-volume and cost-effective methods for producing non-spherical metal particles, particularly methods for producing metal cubes having rounded edges. The metal cubes having rounded edges are useful as ballistic shot in shotshell loads for hunting, where the particle shape imparted by the disclosed process packs to a higher density than spherical shot in the same volume.

New net shape strength retaining high temperature alloy parts are formed from fine metallurgical powders by mechanically blending the powders and placing them in die, placing a piston in the die, extending the piston into a driving chamber, filling the chamber with CH4 and air and compressing the powders with the filling pressure. Igniting gas in the chamber drives the piston into the cavity, producing pressures of about 85 to 150 tsi, compacting the powders into a near net shape alloy part, ready for sintering at 2300° C. without shrinking. The alloy parts are Re, Mo—Re, W—Re, Re—Hf—HfC, Re—Ta—Hf—HfC, Re—Mo—Hf—HfC, Mo—Re—Ta, Mo—Re-f-HfC, W—Re—Hf—HfC, W—Re—Ta—Hf—HfC or W—Re—Mo—Hf alloys.

A method of making metal nanoparticles and carbon nanotubes is disclosed. A mixture of a transition metal compound and an aromatic polymer, a precursor of an aromatic polymer, or an aromatic monomer is heated to form a metal nanoparticle composition, optionally containing carbon nanotubes.

A process for manufacturing high aspect ratio silver nanowires is provided, wherein the recovered silver nanowires exhibit an average diameter of 25 to 80 nm and an average length of 10 to 100 μm; and, wherein the total glycol concentration is

Carbothermic reduction of magnesium oxide at approximately 2200 degrees Kelvin yields a high temperature mixture of magnesium vapors and carbon monoxide gas. Previous processes have sought to cool or alter the mixture to cause the yield of pure magnesium, which is then used in subsequent processes for its reducing properties. The present invention takes advantage of the stability and inertness of carbon monoxide at elevated temperatures enabling the magnesium vapor/carbon monoxide gas mixture from the carbothermic process to be used directly for the production of other metals at high temperatures. Chromium oxide, manganese oxide, zinc oxide and sulfide, and several other metal compounds can be reduced by the magnesium vapor/carbon monoxide gas mixture at temperatures high enough to prevent the gas mixture from back-reacting to magnesium oxide and carbon.

A high strength, corrosion resistant alloy suitable for use in oil and gas environments includes, in weight %: 0-12% Fe, 18-24% Cr, 3-6.2% Mo, 0.05-3.0% Cu, 4.0-6.5% Nb, 1.1-2.2% Ti, 0.05-0.4% 0.05-0.2% Al, 0.005-0.040% C, balance Ni plus incidental impurities and deoxidizers. A ratio of Nb/(Ti+Al) is equal to 2.5-7.5 to provide a desired volume fraction of γ' and γ″ phases. The alloy has a minimum yield strength of 145 ksi.

A steel material superior in high temperature characteristics and toughness is provided, that is, a steel material containing, by mass %, C: 0.005% to 0.03%, Si: 0.05% to 0.40%, Mn: 0.40% to 1.70%, Nb: 0.02% to 0.25%, Ti: 0.005% to 0.025%, N: 0.0008% to 0.0045%, B: 0.0003% to 0.0030%, restricting P: 0.030% or less, S: 0.020% or less, Al: 0.03% or less, and having a balance of Fe and unavoidable impurities, where the contents of C and Nb satisfy C—Nb/7.74≦0.02 and Ti-based oxides of a grain size of 0.05 to 10 μm are present in a density of 30 to 300/mm2.

The present invention provides a high Al-content steel sheet having an excellent workability and a method of production of the same at a low cost by mass production, a high Al-content metal foil and a method of production of the same, and a metal substrate using a high Al-content metal foil, that is, a high Al-content steel sheet having an Al content of 6.5 mass % to 10 mass %, the high Al-content steel sheet characterized by having one or both of a {222} plane integration of an α-Fe crystal with respect to the surface of the steel sheet of 60% to 95% or a {200} plane integration of 0.01% to 15% and a method of production of the same, a high Al-content metal foil and a method of production of the same, and a metal substrate using a high Al-content metal foil.

A method of manufacturing a high-strength galvanized steel sheet includes hot-rolling a slab to form a steel sheet; during continuous annealing, heating the steel sheet to a temperature of 750° C. to 900° C. at an average heating rate of at least 10° C./s at a temperature of 500° C. to an A1 transformation point; holding that temperature for at least 10 seconds; cooling the steel sheet from 750° C. to a temperature of (Ms point—100° C.) to (Ms point—200° C.) at an average cooling rate of at least 10° C./s; reheating the steel sheet to a temperature of 350° C. to 600° C.; holding that temperature for 10 to 600 seconds; and galvanizing the steel sheet.

A welding method for welding workpieces made of highly heat-resistant superalloys is provided. The method includes generating a heat input zone on the workpiece surface by means of a heat source, feeding welding filler material into the heat input zone by means of a feeding device, and generating a relative motion between the heat source and the feeding device on one hand and the workpiece surface on the other hand by means of a conveying device. Furthermore, according to the welding method, the mass feed rate is ≦350 mg/min.

A multiphase steel sheet has a steel composition containing, in percent by mass, more than 0.015% to less than 0.100% of carbon, less than 0.40% of silicon, 1.0% to 1.9% of manganese, more than 0.015% to 0.05% of phosphorus, 0.03% or less of sulfur, 0.01% to 0.3% of soluble aluminum, 0.005% or less of nitrogen, less than 0.30% of chromium, 0.0050% or less of boron, less than 0.15% of molybdenum, 0.4% or less of vanadium, 0.02% or less of titanium, wherein [Mneq] is 2.0 to 2.8, the balance being iron and incidental impurities.

A warewashing detergent composition is provided for use for in cleaning of alkaline sensitive metals such as aluminum or aluminum containing alloys. The compositions include alternatives to sodium tripolyphosphate and/or other phosphorous containing raw materials, while retaining cleaning performance and corrosion prevention. According to the invention, high molecular weight polyacrylates (polyacrylic acid homopolymers) with a molecular weight of at least about 5000 are used as corrosion inhibitors and can be included for aluminum protection in a number of different detergent compositions.

The invention meets the needs above by providing a surfactant system, mixture or blend that can be used as a part of a soaking composition. The surfactant system is capable of forming emulsions with, and thus removing, oily and greasy stains. In a preferred embodiment the surfactant compositions of the invention can remove non-trans fat and fatty acid stains. The invention involves foaming soaking compositions that have some or part of the anionic surfactant present in the same replaced with an extended chain anionic surfactant.

A system and process for the preparation of high quality gasoline through recombination of catalytic hydrocarbon includes fractionator and extractor. The upper part of the fractionator is equipped with light petrol pipeline, the lower part of the fractionator is equipped with heavy petrol pipeline, the middle part of the fractionator is equipped with medium petrol pipeline. The medium petrol pipeline is connected with a medium petrol extractor, the upper part of the medium petrol extractor is connected with the medium petrol raffinate oil hydrogenation unit through the pipeline, the lower part of the medium petrol extractor is connected with the medium petrol aromatic hydrocarbon hydrogenation unit through the pipeline. The medium petrol aromatic hydrocarbon hydrogenation unit is then connected with the light petrol pipeline in the upper part of the fractionator through the pipeline, the lower part of the heavy petrol extractor is connected with the medium petrol aromatic hydrocarbon hydrogenation unit through the pipeline, the upper part of the heavy petrol extractor is connected with the medium petrol raffinate oil hydrogenation unit through the pipeline.

A knitting machine comprising a needle holder, which supports a plurality of needles which can be actuated with an alternating motion along their axis and means for guiding the needles on the needle holder which comprise channels for forming knitting which are defined proximate to the end of the needle holder and sliding channels which are defined on the needle holder in a region that is spaced from the end of the needle holder, each one of the channels for forming knitting being engageable by a needle and defining with its inlet, which is directed toward the outside of the needle holder, resting contact regions for the knitting during the retracting motion of the needles, the number of the sliding channels being smaller than the number of the channels for forming knitting.

A cold rolling mill is described wherein the unstressed shape of metal sheet is continuously sensed during rolling by a plurality of negligible displacement force sensors perpendicularly disposed relative to the pass line at a mill location producing a tensile stress above 4,000 p.s.i. in the metal sheet being rolled. The output signals from those sensors underlying opposite edges of the metal sheet are compared to equalize reduction at the sheet edges while the difference between the force measured by a centrally situated sensor and the average force measured by the sensors underlying opposite edges of the sheet provide a signal indicative of the roll bending force required to produce flat sheet.

A temperature controlled showerhead assembly for chemical vapor deposition (CVD) chambers enhances heat dissipation to provide accurate temperature control of the showerhead face plate and maintain temperatures substantially lower than surrounding components. Heat dissipates by conduction through a showerhead stem and removed by the heat exchanger mounted outside of the vacuum environment. Heat is supplied by a heating element inserted into the steam of the showerhead. Temperature is controlled using feedback supplied by a temperature sensor installed in the stem and in thermal contact with the face plate.

The invention is directed to manufacture of fertilizer having commercial levels of nitrogen supplemented with organic substances. The process treats organic matter with acid causing hydrolysis of organic polymers after which the mix is injected with nitrogen. The resultant sterilized and liquefied organic matter is disbursed over recycled material for the production of granules. Because the process allows for the controlled addition of acids and ammonia, desired levels of components can be achieved. The process is scalable, odor controlled and safe thereby allowing for the location of biosolid processing facilities in most any location. Further, the fertilizer of the invention provides a dual nitrogen-release profile when applied to crops. After application to soil, fertilizer of the invention releases an immediate bolus of nitrogen, similar to traditional ammonium sulfate, followed by continued slow release of nitrogen typically over a season.

A method of manufacturing a roller cone drill bit may include forming a body of a single piece having an upper end and a lower end; machining at the lower end of the body at least two journals extending downward and radially outward from a central axis of the body; machining at least one of a ball passage, a hydraulic fluid passageway, a grease reservoir, and a lubricant passageway; and mounting roller cones on the at least two journals.

A group of tertiary amine azides are useful as hypergolic fuels for hypergolic bipropellant mixtures. The fuels provide higher density impulses than monomethyl hydrazine (MMH) but are less toxic and have lower vapor pressures that MMH. In addition, the fuels have shorter ignition delay times than dimethylaminoethylazide (DMAZ) and other potential reduced toxicity replacements for MMH.

Compositions and methods relating to gas generants used in inflatable restraint systems. The gas generant grains formed via spray drying techniques of the present disclosure provide superior performance, including high burn rates and high gas yields. Further, processing of the gas generant grain products can be streamlined. Such gas generants include by way of non-limiting example, guanidine nitrate, basic copper nitrate, and a secondary oxidizer, such as potassium perchlorate.

A composition capable of producing either solid propellant grains, liquid or gel monopropellants, all of which are electrically ignitable and capable of sustained controllable combustion at ambient pressure. Additional compositions capable of sustained controllable combustion at elevated pressures are described. Applications for the compositions disclosed herein are provided, and include among other applications use in small micro thrusters, large core-burning solid propellant gains, shaped explosives charges for military application, and pumpable liquids and gel monopropellants or explosives for military, commercial mining or gas and oil recovery. In alternative embodiments the above compositions may also incorporate an energetic nitrate polymer, bum rate modifiers, and/or metal fuel(s). The HIPEP formulation makes it possible to ignite and sustain combustion at ambient and vacuum conditions (a) without continuous electrical power and (b) while providing faster bum rates.

The invention is a composition for a high burning-rate solid rocket propellant, where the composition includes a binder compounded with a soluble energetic additive; a metallic fuel; and an oxidative fuel. The resulting composition has a tactical Class 1.3 hazard rating, and a linear regression rate that is substantially equivalent to a tactical Class 1.1 hazard rating obtainable using solid rocket propellants. The composition may include a heat-conducting element, a plasticizer, a curing component, a combustion catalyst, and curing catalyst.

Disclosed is a high performance hydrocarbon fuel characterized by a hydrogen content greater than 14.3% by weight, a hydrogen to carbon atomic ratio greater than 2.0 and/or a heat of combustion greater than 18.7 KBtu/lb. The disclosed fuels generally have a paraffin content that is at least 90% by mass and a C12-C20 isoparaffin content of at least 40% by mass.

The invention relates to a method for obtaining high-tenacity aramid yarn, wherein the yarn is made of a copolymer obtained from a mixture of monomers comprising DAPBI, an aromatic para-diamine, and an aromatic para-diacid, wherein the yarn is heated in at least two process steps, characterized in that in a first step the yarn is heated at a temperature of 200 to 360° C. at a tension of at least 0.2 cN/dtex, followed by a second step wherein the yarn is heated at a temperature of 370 to 500° C. at a tension of less than 1 cN/dtex. The invention further pertains to a multifilament aramid yarn spun from a sulfuric acid spin dope and having a tenacity of at least 2500 mN/tex.

The invention relates to a high strength fibers comprising a coating of cross-linked silicone polymer, and ropes made thereof. The fibers are preferably high performance polyethylene (HPPE) fibers. The coating comprising a cross-linked silicone polymer is made from a coating composition comprising a cross-linkable silicone polymer. The rope shows markedly improved service life performance in bending applications such as cyclic bend-over-sheave applications. The invention also relates to the use of a cross-linked silicone polymer in a rope for an improvement of bend fatigue resistance.

The invention relates to a polymer composition which absorbs infrared radiation (IR), containing a transparent thermoplastic plastic, an inorganic infrared absorber, also referred to as IR absorber hereinbelow, at least one inorganic nano-scale pigment, and the combination of at least two organic coloring agents of a specific structure, and to the preparation and use of the polymer compositions according to the invention and to products produced therefrom.

An integrated circuit includes a drive circuit with a first inverter circuit with a first transistor of a first conductivity type and a second transistor of a second conductivity type. The drains of the first and second transistors are connected. An output circuit is provided having a third transistor of the second conductivity with a gate connected to the drains of the first and second transistors. A capacitor is connected between the gate and a drain of the third transistor and has a capacitance greater than 0.5 pF and less than or equal to 3.0 pF. A gate width of the first transistor when divided by a gate width of the third transistor has a value of less than 1/100. The output circuit is configured to output a transmission signal from the drain of the third transistor.

A system includes a SiC semiconductor power device; a power supply board that is configured to provide power to a first gate driver board via a connector; the first gate driver board that is coupled and configured to provide current to the SiC semiconductor power device, wherein the first gate driver board is coupled to the power supply board via the connector, and wherein the first gate driver board is separated from the power supply board; and an interconnect board that is coupled to the first gate driver board, wherein the interconnect board is configured to couple the first gate driver board a second gate driver board.

Embodiments of the inventive concept provide a double-sealed high-temperature resistant DC ignitor for use with a wood pellet burner assembly. The DC ignitor includes a non-heating element portion. The non-heating element portion is connected to at least one of a battery or an AC to DC electrical transformer attached to the wood pellet burner assembly. A heating element is connected to the non-heating element portion, and extends by at least one inch into a combustion region of the wood pellet burner assembly. The heating element portion is configured to be heated by power received from the battery or the AC to DC electrical transformer. The DC ignitor provides safe, reliable, and fast combustion of wood pellets that congregate in a combustion region of the wood pellet burner assembly.

Electro-mechanical and electronically controlled access devices are described for controlling access to a building, premises or area in a secure manner such that a subject who is deemed ineligible for access will be barred entry and may be optionally retained. The devices can contain multiple rotatable door panels, which can be positioned behind one another. The door panels can be controlled by mechanized arms or other control devices in order to control the passage through the device. The direction of flow through a device according to these embodiments is electronically controlled and may be changed at any point in time. At any instant in time, the flow through the device is unidirectional. Multiple devices can be stacked together to form clusters, which can be controlled according to traffic, time of day, or other factors.

Processing and use of ultra-high solids formulations wherein no drying step is needed for the formulation to be incorporated in a wide variety of applications. Adhesives, top-coatings, sealants, fasteners are amongst the use areas.

An ion implantation apparatus, system, and method are provided for transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.