The present disclosure provides a display substrate and fabricating method, a display panel, and a display apparatus. The display substrate includes a substrate including a sealing region and a driving wire on the substrate. At least a portion of the driving wire is in the sealing region. The portion of the driving wire includes: a first surface, a second surface opposite to the first surface, and sides there-between connecting to the first surface and the second surface. Each side has a projection width on the substrate of at least about 1 μm.

A light emitting device having a structure in which oxygen and moisture are prevented from reaching light emitting elements, and a method of manufacturing the same, are provided. Further, the light emitting elements are sealed by using a small number of process steps, without enclosing a drying agent. The present invention has a top surface emission structure. A substrate on which the light emitting elements are formed is bonded to a transparent sealing substrate. The structure is one in which a transparent second sealing material covers the entire surface of a pixel region when bonding the two substrates, and a first sealing material (having a higher viscosity than the second sealing material), which contains a gap material (filler, fine particles, or the like) for protecting a gap between the two substrates, surrounds the pixel region. The two substrates are sealed by the first sealing material and the second sealing material. Further, reaction between electrodes of the light emitting elements (cathodes or anodes) and the sealing materials can be prevented by covering the electrodes with a transparent protective layer, for example, CaF2, MgF2, or BaF2.

A display apparatus including a substrate; a display unit disposed on the substrate; a sealing layer disposed on the display unit; a touch screen layer disposed on the sealing layer; and a buffer layer disposed between the sealing layer and the touch screen layer. The sealing layer includes n sealing units each including an organic layer and an inorganic layer, in which n is an integer of 1 or greater. The organic layer and the inorganic layer are sequentially stacked on the display unit. The organic layer includes a cured product for forming an organic layer including a first photocurable monomer. The buffer layer includes a cured product for forming a buffer layer including a second and third photocurable monomer. The first and second photocurable monomers include a photocurable functional group. The third photocurable monomer is represented by Formulae 1A to 1C.

A display device, which includes a display region constituted by a plurality of pixels, includes a first substrate having a hygroscopic agent formed in a peripheral region outside the display region and a sealing film covering the hygroscopic agent, a second substrate disposed facing the first substrate, and an adhesive layer, at least a portion of which is disposed closer to the side of the display region than the hygroscopic agent, and which bonds the first substrate to the second substrate.

The present application discloses a light emitting diode comprising a plurality of sub-pixels comprising a first electrode layer, wherein the first electrode layer is a reflective electrode layer; a second electrode layer; a light emitting layer between the first electrode layer and the second electrode layer; a first microcavity tuning layer sandwiched by the first electrode layer and the light emitting layer within the plurality of sub-pixels; and a second microcavity tuning layer sandwiched by the first microcavity tuning layer and the light emitting layer within at least one of the plurality of sub-pixels, and the first microcavity tuning layer is sandwiched by the first electrode layer and the second microcavity tuning layer within the at least one of the plurality of sub-pixels. The first microcavity tuning layer is made of a material including a transparent conductive material in a first state and the second microcavity tuning layer is made of a material including a transparent conductive material in a second state, the first state and the second state are different states selected from a crystalline state and an amorphous state.

An OLED display panel with a method manufacturing the same includes: a substrate; an OLED display device, formed on the substrate; a cover plate, disposed on the substrate to seal the OLED display device; and a first resonant cavity layer, formed on the OLED display device and below the cover plate, configured to absorb blue light with wavelengths between 400 and 440 nm. By adjusting a resonant cavity length of the resonant cavity, the present disclosure changes a proportion of energy of blue light to a preset wavelength band in emitting light, significantly reduces a proportion of a spectrum below 435 nm to the preset wavelength band, and reduces material use of the resonant cavity layer, being conducive to improving device efficiency and reducing production cost, and being able to obtain eye-protecting effect at the same time.

Provided is a display device and a manufacturing method of the same. The display device includes: a base substrate having a top surface and a side surface, a display region over the top surface, a terminal over the top surface and between the display region and the side surface, the terminal being electrically connected to the display region, and an anisotropic conductive film over the terminal. An edge portion of the anisotropic conductive film is spaced from the side surface, and its distance is equal to or larger than 10 μm and equal to or smaller than 1 mm.

There is provided coal gasification unit including: a coal gasifier; a char recovery unit; flare equipment; an air flow rate adjustment valve and an oxygen supply flow passage that supply oxygen-containing gas to the coal gasifier; an inert gas supply flow passage that supplies nitrogen gas to an upstream side of the char recovery unit; and a control unit that controls a supply amount of the oxygen-containing gas and a supply amount of the nitrogen gas, in which the coal gasifier has a starting burner, and in which the control unit controls the supply amount of the nitrogen gas prior to starting combustion of starting fuel by the starting burner so that an oxygen concentration of mixed gas in which combustion gas generated by combustion of the oxygen-containing gas and the starting fuel has been mixed with the nitrogen gas becomes not more than an ignition concentration.

A product for use in a turbocharger system. A turbine housing may define a center core that is circular in shape with a circumference. The turbine housing may define a first volute that extends for a length around only a part of the circumference of the center core, and a second volute that may be positioned radially outside the first volute and that may extend entirely around the circumference of the center core. The first volute and the second volute may define first and second exhaust gas passages through the turbine housing that may be asymmetric. All points of the second volute may be radially outside the first volute from the center core over the entire length of the first volute.

In one embodiment, a plant control apparatus is configured to control a power generating plant that includes a gas turbine configured to be driven by a gas, an exhaust heat recovery boiler configured to generate steam by using heat of an exhaust gas from the gas turbine, a temperature reducing apparatus configured to cool, through a cooling medium, the steam generated by the exhaust heat recovery boiler, and a steam turbine configured to be driven by the steam cooled by the temperature reducing apparatus. The plant control apparatus includes an output controller configured to control output of the gas turbine, and a temperature reduction controller configured to control a cooling operation of the steam by the temperature reducing apparatus while the output controller controls the output of the gas turbine.

In a method of reducing pollutants of a combustion engine, exhaust gas, generated by a cylinder of the combustion engine, is fed to an exhaust gas aftertreatment system as a function of a predefined condition solely via a first exhaust channel which communicates with a first one of first and second exhaust valves of the cylinder. The first exhaust channel is hereby coated, at least in part, by a thermally insulating layer selected such that a heat input is transmitted to the exhaust gas aftertreatment system which heat input is greater than a heat input in a second exhaust channel communicating with a second one of the first and second exhaust valves. The predefined condition is defined as a function of a coolant temperature of the combustion engine.

An exhaust treatment system comprising a first oxidation catalyst to oxidise nitrogen and/or carbon compounds in an exhaust stream and a first dosage device downstream of said first oxidation catalyst to supply a first additive. A first reduction catalyst device is arranged downstream of said first dosage device for reduction of nitrogen oxides using said first additive, and for the generation of heat, through at least one exothermal reaction with said exhaust stream. A particulate filter arranged downstream of said first reduction catalyst device to catch soot particles and a second dosage device, arranged downstream of said particulate filter to supply a second additive. A second reduction catalyst device is arranged downstream of said second dosage device for reduction of nitrogen oxides in said exhaust stream, through the use of at least one of said first and said second additive.

A controller is provided, which detects operating conditions of an internal combustion engine on the basis of detection results from a group of sensors and drives an actuator that modifies an opening position of a wastegate valve on the basis of the operating conditions. When driving the wastegate valve to a fully closed opening, the controller initially drives the actuator toward a preset provisional fully closed position, and after determining on the basis of a detection result from a position sensor that an actual opening of the wastegate valve has reached the provisional fully closed opening, switches a target opening to the fully closed opening and drives the actuator accordingly.

A required opening correction amount is calculated based on a target supercharging pressure and an actual supercharging pressure, a target opening is calculated based on a required opening and the required opening correction amount, an actual operating position of a wastegate valve is determined to correspond to a fully closed position when the wastegate valve is in a fully closed condition, an actual opening of the wastegate valve is calculated based on the fully closed position and the actual operating position, an operation amount of an actuator for aligning the target opening with the actual opening is calculated based on the target opening and the actual opening, and when the target opening corresponds to the fully closed condition and the actual operating position is not decreased at or above a prescribed rate, the fully closed position is updated to the actual operating position.

A gas turbine engine system and method of operating gas turbine engines are provided. The gas turbine engine assembly includes a gas turbine engine includes a power shaft configured to rotate about an axis of rotation. The gas turbine engine assembly also includes a first fan and a second fan coupled to the power shaft coaxially with the gas turbine engine. The gas turbine engine assembly also includes a first fan duct configured to direct a first stream of air to the first fan. The gas turbine engine assembly also includes a second fan duct configured to direct a second stream of air to the second fan. The gas turbine engine assembly also includes an exhaust duct configured to direct a stream of exhaust gases of the gas turbine engine in a direction of the axis of rotation.

A system includes a gas turbine system having a turbine combustor, a turbine driven by combustion products from the turbine combustor, and an exhaust gas compressor driven by the turbine. The exhaust gas compressor is configured to compress and supply an exhaust gas to the turbine combustor. The gas turbine system also has an exhaust gas recirculation (EGR) system. The EGR system is configured to recirculate the exhaust gas along an exhaust recirculation path from the turbine to the exhaust gas compressor. The system further includes a main oxidant compression system having one or more oxidant compressors. The one or more oxidant compressors are separate from the exhaust gas compressor, and the one or more oxidant compressors are configured to supply all compressed oxidant utilized by the turbine combustor in generating the combustion products.

The heat exchanger system includes a first heat exchanger assembly including a plurality of airfoil members circumferentially spaced in a flow stream of an annular duct. Each airfoil member including a radially inner end and a radially outer end and a first internal flowpath configured to channel a flow of cooled fluid therethrough. The heat exchanger assembly includes a second heat exchanger assembly including a plurality of fin members extending proximate the flow stream and a second internal flowpath configured to channel a flow of cooled fluid therethrough. The heat exchanger assembly includes a header system including a conduit path configured to couple the first heat exchanger assembly and the second heat exchanger assembly in flow communication. The header system includes an inlet connection configured to receive a flow of hot fluid from thermal loads and an outlet connection configured to direct cooled fluid to thermal loads.

A gas turbine engine cooling system includes a gas turbine engine. The gas turbine engine includes a core engine, a cold sink, a core undercowl space, and a core cowl at least partially surrounding the core engine and defining a radially outer wall of the core undercowl space. The gas turbine engine cooling system includes an undercowl component positioned in the core undercowl space. The gas turbine engine cooling system also includes a heat pipe including a first end, a second end, and a conduit extending therebetween. The first end is thermally coupled to the undercowl component, and the second end is thermally coupled to the cold sink. The heat pipe facilitates transfer of a quantity of heat from the undercowl component to the cold sink.

The heat exchanger assembly includes a first internal flow path configured to channel a flow of fluid to be cooled from a first inlet to a first outlet. The heat exchanger assembly also includes a second internal flow path configured to channel a flow of a first coolant from a first inlet to a first outlet. The heat exchanger assembly further includes an external flow path configured to receive a flow of a second coolant proximate a surface of the external flow path.

A method for controlling a pressure control mechanism in a turbofan engine having a precooler permitting heat exchange between ambient air and bleed air includes detecting at least one of an engine failure or a bleed system failure, detecting at least one of an ice condition or an activation of an anti-ice system, and actuating the pressure control mechanism, thereby altering the heat exchange between the ambient air and the bleed air.

In a rotary machine, a method of assembling a rotary machine, and a method of performing maintenance of a rotary machine, a combustor casing as an outer casing configured from upper and lower casings forming a half split shape, an intermediate shaft cover as an inner casing configured from upper and lower casings forming a half split shape and supporting a combustor in the combustor casing, and a pressing support mechanism that presses and supports a portion to be fit of the combustor casing and a fitting portion of the intermediate shaft cover in an axial direction of a rotor are provided, and thus, detachment of the casing is made easy and maintainability of an inside thereof is improved in the method of performing maintenance of a rotary machine.

A method for operating a stationary gas turbine at partial load, having at least one compressor, at least one expansion turbine and a combustion chamber provided with at least one burner, which gas turbine further includes a hydraulic gap adjuster, wherein the method has the following steps: operating the gas turbine at partial load; operating the a hydraulic gap adjuster; during the operation of the hydraulic gap adjuster, increasing the fuel supply to the burner while increasing the temperature of the combustion gases which are guided to the expansion turbine.

The invention is in the field of engine building technology and may be used in space technology or aviation. Liquid-propellant rockets with Laval nozzles are well known, and they have the following insufficiencies: (1) high fuel consumption rates, which lead to increased dimensions and engine weight and boosters; (2) a relatively low combustion efficiency, because the low mass of the combustion products are emitted into the environment; (3) the large length of the de Laval nozzles with increased expansion ratios increase the dimensions and the engine weight; (4) use of high temperature rocket propellants—combustion products—in the camera and de Laval nozzle. These insufficiencies suppress using liquid-propellant rockets in space technology. The goal of the invention is decreasing the influence of these insufficiencies and obtaining an engine with improved efficiency. The goal is achieved with the creation of an engine with the subsonic discharge of combustion products and the creation of a simple nozzle construction.

A turbofan engine assembly includes a core gas turbine engine with a booster compressor having a radially outer diameter, a fan case assembly, and an outlet guide vane assembly. The outlet guide vane assembly includes a plurality of outlet guide vane segments spaced circumferentially about the core gas turbine engine. Each outlet guide vane segment of the plurality of outlet guide vane segments includes a radially inner fan hub frame flange configured to couple to the core gas turbine engine, a radially outer fan case flange configured to couple to the fan case assembly, and a plurality of outlet guide vanes extending therebetween. The radially inner diameter of the outlet guide vane assembly is smaller than the radially outer diameter of the booster compressor.

An electro-hydraulic actuation system includes a regeneration valve in fluid communication with a first fluid chamber and a second fluid chamber of a hydraulic actuator, and a dump valve is in fluid communication with the second fluid chamber and a fluid reservoir. A pump provides a flow of fluid to the first and second fluid chambers, a displacement of the pump controlling a velocity of the actuator during motion in the retraction and extension directions. An electric motor drives the pump, and a controller controls a state of the regeneration valve and the dump valve. At least one feedback device senses a system condition and provides a respective feedback signal indicative of the sensed system condition to the controller, the controller responsive to the feedback signal to determine an occurrence of an over-center load condition and control a state of the regeneration valve and the dump valve in response to the occurrence to maintain the velocity of the actuator.

A label manufacturing method including: applying an adhesive to a base sheet to form an adhesive layer; applying an acrylate-based bonding adhesive to part of the adhesive layer to cure the adhesive layer so as to form a cured portion; and cutting the cured portion to define labels. A label having an adhesive layer 12 laminated on a base sheet 13. A part of the adhesive layer 12 is cured to form a cured portion 14, wherein the cured portion 14 is cured by an acrylate-based bonding adhesive for enabling cutting labels off the laminated base sheet.

A fluid activatable adhesive for a liner-free label and methods of using are described. Preferably, the adhesive composition includes a polymer, such as an emulsion polymer formed from monomers selected from the group consisting of butyl acrylate, 2-ethylhexyl acrylate, methyl acrylate, 2-acrylamido-2-methylpropane sulfonic acid (AMPS), a salt of AMPS, such as its sodium salt, styrene, and combinations thereof. The adhesive composition adheres to the liner-free label to the surface of a substrate that is at room temperature, at room temperature and wet, cold, or cold and wet. In preferred embodiments, the substrate is glass or plastic, such as polyethylene terephthalate.

Methods, apparatuses and systems are disclosed for chemically etching parts by generating an enclosed chemical etching chamber in contact with a part surface and directing a flow of chemical etchant solution in contact with a part region to be etched.

To provide a method of producing scented tissue paper. The problem is solved by performing shrink wrapping in which a tissue paper housing obtained by carrying fragrance-containing microcapsules on an inner surface of a housing box using a binder is covered with a shrink film and the shrink film is exposed to hot air W so as to be attached to the tissue paper housing, causing the fragrance-containing microcapsules to be detached from the binder by heating the tissue paper housing at the time of the shrink wrapping, and providing the scent for plural sheets of tissue papers.

A pipe lining material impregnated with a thermosetting resin is inserted into a pipe and the thermosetting resin impregnated therein is cured to line the pipe with the pipe lining material. A circulation pump is used to circulate water in a water tank to a boiler to heat the water into hot water. The hot water is pumped using a spraying pump and sprayed on the pipe lining material to cure the thermosetting resin impregnated therein. After the thermosetting resin has been cured, the hot water pumped using the circulation pump is circulated to a cooler to cool the hot water into cool water, which is sprayed on the cured thermosetting resin to cool it. The sprayed hot or cool water that remains inside the lined pipe is returned to the water tank for circulation to the boiler or the cooler.

A dry etching apparatus plasma processes a wafer held by a carrier having a frame and an holding sheet. The carrier is placed on an electrode unit of a stage provided in a chamber. The electrode unit is cooled by a cooling section configured to cool the electrode unit. An upper face of the electrode unit is at least as large as the back side of the carrier. The holding sheet and the frame are cooled effectively by the heat transfer to the stage.

A surface machining method for a single crystal SiC substrate, including: a step of mounting a grinding plate which includes a soft pad and a hard pad sequentially attached onto a base metal having a flat surface, a step of generating an oxidation product by using the grinding plate, and a step of grinding the surface while removing the oxidation product, wherein abrasive grains made of at least one metallic oxide that is softer than single crystal SiC and has a bandgap are fixed to the surface of the hard pad.

A pattern-forming method includes providing a first ion beam at a first incidence angle and a second ion beam at a second incidence angle to a surface of an etch target layer formed on a substrate. Patterns are formed by patterning the etch target layer using the first and second ion beams. The first ion beam and the second ion beam are substantially symmetrical to each other with respect to a normal line that is perpendicular to a top surface of the substrate. Each of the first and second incidence angles is greater than 0 degrees and smaller than an angle obtained by subtracting a predetermined angle from 90 degrees.

A transfer system includes an expander roll for removing a wrinkle in a separator original sheet, and (i) the expander roll and (ii) a transfer roller immediately followed by or following the expander roll are spaced from each other at a distance of not less than 1 m and not more than 10 m.

A prepreg provided with a first resin layer and a second resin layer which is formed on this first resin layer, wherein the first resin layer is formed by a first resin composition, the second resin layer is a layer which comprises a resin layer which is formed by a second resin composition which is different from the first resin composition and in which a fiber base material is contained, the second resin layer is provided with a fiber base material-containing layer which contains the fiber base material, an A layer which is positioned at an opposite side of the first resin layer side of the fiber base material-containing layer and which does not contain the fiber base material, and a B layer which is positioned at the first resin layer side of the fiber base material-containing layer and which does not contain the fiber base material, and said B layer has a thickness which is smaller than the thickness of the first resin layer, is provided.

A method of verifying removal of peel ply material from a composite structure is provided. The method includes doping a layer of peel ply fabric with an identifier. The method also includes curing the composite structure with the layer of peel ply fabric disposed on a surface of the composite structure. The method further includes removing the layer of peel ply fabric from the surface. The method yet further includes scanning the surface of the composite structure for the identifier.

An apparatus and related method of utilizing articulating vacuum plates to manipulate a film or polymeric sheet and form a three dimensional article is provided. The apparatus can be in the form of an articulating vacuum plate system which includes one or more plates or mold parts that are configured to support a sheet, constructed for example, from a polymeric film, in a two dimensional configuration or a three dimensional configuration in a first mode. The apparatus is constructed so that the plates and/or mold parts can articulate or move so as to reconfigure the sheet from a generally planar configuration into a second three dimensional configuration in a second mode for further forming, optionally while the plates and/or mold parts apply vacuum to the sheet while the plates and/or mold parts articulate, so that the plates and/or mold parts bend or otherwise manipulate the configuration and shape of the sheet.

The invention relates to compositions comprising composite materials comprised of discontinuous fibers and one or more polymers and/or oligomers. The invention relates to methods of making the same. The composite materials can be in the form of compositions, composite sheets, laminates, pellets, and/or shaped composite products.

A method and a device for heat sealing multiple plies of a laminate from which gable top packaging can be produced, wherein the laminate has a carrier layer made of electrically non-conductive material and a sealing layer made of thermoplastic material on at least one surface of the laminate. To heat seal multiple plies of a laminate in a high-frequency alternating electric field, the alternating electric field is generated by a first lead of an HF voltage supply in a first sub-region of the sealing region and is generated by a second lead of the HF voltage supply, differing from the first lead, in at least a second sub-region of the sealing region, so that a different heat distribution is obtained over the sub-regions of the sealing region.

Apparatuses and methods for applying a transfer material onto the surface of an article are disclosed, including apparatuses and methods of transfer printing on and/or decorating three-dimensional articles, as well as the articles printed and/or decorated thereby. In some cases, the apparatuses and methods involve providing a deposition device, such as a printing device; providing a transfer component; depositing a material onto a portion of the transfer component with the deposition device; modifying the portion of the transfer component with the transfer material thereon to conform the transfer component to at least a portion of the surface of the three-dimensional article; and transferring the transfer material onto the surface of the article.

Apparatuses and methods for applying a transfer material onto the surface of an article are disclosed, including apparatuses and methods of transfer printing on and/or decorating three-dimensional articles, as well as the articles printed and/or decorated thereby. In some cases, the apparatuses and methods involve providing a deposition device, such as a printing device; providing a transfer component; depositing a material onto a portion of the transfer component with the deposition device; modifying the portion of the transfer component with the transfer material thereon to conform the transfer component to at least a portion of the surface of the three-dimensional article; and transferring the transfer material onto the surface of the article.

A method for making a composite structure with a surfacing film thereon. The surfacing film is co-cured with fiber-reinforced resin composite materials. The surfacing film is formed from a curable resin composition containing an epoxy novolac resin, a tri-functional or tetra-functional epoxy resin, ceramic microspheres, an amine-based curing agent, particulate inorganic fillers; and a toughening component. The surfacing film exhibits high Tg and high cross-linked density after curing, as well as high resistance to paint stripper solutions.

A device for producing a strip-shaped composite sheet may comprise at least two outer metal cover sheets and at least one plastic layer disposed between the two outer metal cover sheets. The device may further comprise at least one first laminating device for laminating the metal cover sheets with the at least one plastic layer arranged between the metal cover sheets, with the first laminating device comprising at least two laminating rolls forming a laminating gap. One object of the present disclosure is to provide methods and devices for producing composite sheets, with which the economy, in particular the production speed, of the production method can be significantly increased and at the same time the risk of delamination of the composite sheets during the further processing can be reduced.”

A machine (1) and a method for thermobonding using an emission of electromagnetic waves (13), for example microwaves, to activate one or a plurality of adhesive layers located between a support and one or a plurality of layers of flexible covering, through a bed of particles (4) fluidized by a humidified gas. A multi-layer upholstery item including at least one non-permeable layer and produced in a single operation is also described.

Method and apparatus for lamination of substrates, e.g. rigid plastic layers, to manufacture laminated products. The methods include the sequential application of vacuum and mechanical force through a two-stroke process performed by a lamination apparatus having one or more force-producing stroke cylinders. Actuation of a cylinder to produce a first stroke creates a sealed chamber within the apparatus, enclosing a stack of substrates to be laminated. The sealed chamber may be evacuated of air by application of a vacuum. Subsequent actuation of a cylinder to produce a second stroke applies mechanical force to the sealed chamber, which compresses the substrates into a laminated product substantially free of air bubbles or voids.

The disclosed composite wood particulate products, adhesives contained in such wood particulate products, and methods of making the adhesive and the wood particulate products employ an aldehyde-free adhesive, and more specifically a formaldehyde-free adhesive. The aldehyde-free adhesive includes an inert additive that extends a resin, such as an isocyanate resin, and forms an evenly dispersed, less expensive polymeric adhesive admixture. The extender-filler of the resin is mixed with water to form a slurry. The slurry can then be mixed with a resin, like the isocyanate resin, to form the adhesive. Various rheology modifiers can be added, if desired, to the extender-filler or the slurry. The adhesive can be blended with wood particles to form a mat that is then pressed into a composite wood particulate product.

A self-masking label and method of use for wrapping about elongate articles. The label includes a series of label sections positioned end-to-end along the length of the label and supported on a carrier strip during printing. A first label section is configured to be marked or printed with indicia; a second label section may be transparent; a third label section is arranged to overlap the first and second sections and to cover and protect the indicia, during for example, an over-coating procedure; and a fourth label section includes a non-sticky tab section.

A plasma system includes a source electrode, an RF source power generation unit, an RF source power output unit, and a source power output managing unit. The source power output managing unit determines an amplitude and a duty cycle of a pulse RF source power based on information on an amplitude of a continuous wave RF source power.

The present invention provides a temperature adjusting apparatus for a focus ring, wherein heat radiated from the plasma onto the focus ring is transferred downward to a base through the first heat conducting pad contacting a lower surface of the focus ring, an insulating ring contacting a lower surface of the first heat conducting pad, and the second heat conducting pad contacting a lower surface of the insulating ring, so as to be cooled by a cooling system provided at the base; turning on a heater disposed in a grounded shielding ring to generate a controllable external heating source, heat from the heater being transferred to the focus ring through the shielding ring, a third heat conducting pad contacting the shielding ring, the insulating ring contacting the third heat conducting pad, and the first heat conducting pad, so as to perform controllable warming to the focus ring. By providing a good heat conduction path in conjunction with controllable heating power, the present invention achieves a fine control of the working temperature of the focus ring such that it is tunable in processing such as etching, thereby satisfying processing demands.

The present invention discloses a multi-zone active-matrix temperature control system, the control system having a temperature control matrix and a gate driver; the temperature control matrix comprising: N*M temperature control modules forming a N-row M-column matrix, a power supply line, and a power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; a semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate, which turn on or off, being connected with the power supply line, and with the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line, of the semiconductor switches of the temperature control modules at a same row or a same column are serially connected, and connected with the power supply line. The present invention may precisely perform temperature control to each zone of the electrostatic chuck and significantly reduces the number of electrostatic chuck lead-out lines.