The present disclosure provides a substrate processing apparatus capable of preventing a heating process from having adverse effects on an operation of supplying gas, even though a shower head is used to supply gas onto a substrate. The substrate processing apparatus includes: a process module having a process chamber where a substrate is processed; a substrate loading/unloading port; a cooling mechanism; a substrate support; a heating unit; a shower head including a dispersion plate made of a material having a first thermal expansion rate; a dispersion plate supporting unit made of a material having a second thermal expansion rate different from the first thermal expansion rate; a first position regulating part configured to regulate positions of the dispersion plate and the dispersion plate supporting unit; and a second position regulating part configured to regulate the positions of the dispersion plate and the dispersion plate supporting unit.

A dry etching apparatus includes a process chamber, a stage, a gas supply device and a plasma generating device. The stage is in the process chamber and is configured to support a wafer, wherein the wafer has a center region and a periphery region surrounding the center region. The gas supply device is configured to supply a first flow of an etching gas to the center region and supply a second flow of the etching gas to the periphery region. The plasma generating device is configured to generate plasma from the etching gas.

The present invention provides a temperature adjusting apparatus for a focus ring, wherein heat radiated from the plasma onto the focus ring is transferred downward to a base through the first heat conducting pad contacting a lower surface of the focus ring, an insulating ring contacting a lower surface of the first heat conducting pad, and the second heat conducting pad contacting a lower surface of the insulating ring, so as to be cooled by a cooling system provided at the base; turning on a heater disposed in a grounded shielding ring to generate a controllable external heating source, heat from the heater being transferred to the focus ring through the shielding ring, a third heat conducting pad contacting the shielding ring, the insulating ring contacting the third heat conducting pad, and the first heat conducting pad, so as to perform controllable warming to the focus ring. By providing a good heat conduction path in conjunction with controllable heating power, the present invention achieves a fine control of the working temperature of the focus ring such that it is tunable in processing such as etching, thereby satisfying processing demands.

The present invention discloses a multi-zone active-matrix temperature control system, the control system having a temperature control matrix and a gate driver; the temperature control matrix comprising: N*M temperature control modules forming a N-row M-column matrix, a power supply line, and a power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; a semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate, which turn on or off, being connected with the power supply line, and with the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line, of the semiconductor switches of the temperature control modules at a same row or a same column are serially connected, and connected with the power supply line. The present invention may precisely perform temperature control to each zone of the electrostatic chuck and significantly reduces the number of electrostatic chuck lead-out lines.

A substrate processing apparatus, including: a process chamber configured to process a substrate, a transfer chamber adjoining the process chamber, a shaft installed in the transfer chamber, a substrate mounting stand connected to the shaft and including a heating part, a first thermal insulation part installed in a wall of the transfer chamber at a side of the process chamber, and a second thermal insulation part installed in the shaft at a side of the substrate mounting stand.

A heat exchange apparatus includes a first heat exchanger configured to transfer heat between a refrigerant and another medium, a plurality of second heat exchangers configured to transfer heat between the refrigerant and the liquid, a compressor configured to pressurize the refrigerant and a plurality of expansion devices for each of the plurality of second heat exchangers and configured to expand the refrigerant pressurized by the compressor, wherein the refrigerant flows through the plurality of second heat exchangers in parallel, and the liquid flows through the plurality of second heat exchangers in series.

Apparatus for and method of rapidly chilling a beverage in which a vessel having high thermal mass relative to the amount of beverage to be introduced into the vessel is cooled through contact with a cooling module to a temperature low enough that a volume of beverage introduced into the vessel is rapidly cooled.

The disclosed apparatus cools a drinking liquid utilizing the Peltier effect, and optionally includes a system of gasification for gasifying the drinking liquid, once cooled. The cooling system in turn includes: a first cooling circuit, in which an operating fluid circulates, associated with a hot side of a Peltier cell; and a second cooling circuit, in which the drinking liquid circulates, associated with a cold side of the Peltier cell. The Peltier cell is integrated in a cooling unit exhibiting a special sandwich structure which integrates, as well as the Peltier cell, a first and a second heat exchanger, apt respectively to exchange directly the heat between the operating fluid which circulates in the first cooling circuit and the hot side of the Peltier cell and between the drinking liquid which circulates in the second cooling circuit and the cold side of the Peltier cell to cool the drinking liquid.

An apparatus for separating and storing liquid refrigerant in a refrigerant circuit including a housing configured as a refrigerant collection container, the housing having a refrigerant outflow line disposed therein. The refrigerant outflow line extending from an inlet opening, which is disposed in a gas refrigerant region and above a level of the liquid refrigerant, via a liquid refrigerant region to the outside, and has a through-opening formed in the liquid refrigerant region. The housing includes a boiling element for liquid refrigerant disposed therein. The boiling element is connected to the refrigerant outflow line in the region of the through-opening, such that a liquid passing through the through-opening from the housing passes through the boiling element by suction of a gas refrigerant.

An evaporator assembly for an ice-making apparatus having a vertical, substantially flat freeze surface, a refrigerant circuit, and a freeze template. The freeze template is thermally coupled between the freeze surface and the refrigerant circuit, and is formed of a plurality of regions arranged in a plane and interconnected by strips having a smaller dimension in the plane than the regions. Interface locations between the freeze template and the freeze surface define where on the freeze surface ice is to be formed. During a freeze cycle, expanded refrigerant is passed through the refrigerant circuit, and water is run over the freeze surface. During a harvest cycle, compressed refrigerant is passed through the refrigerant circuit, wherein heat transfers from the refrigerant circuit to the freeze surface until the freeze surface is warmed to a temperature sufficient to allow ice formed on the freeze surface to fall from the freeze surface by a force of gravity.

Apparatus for and method of rapidly chilling a beverage in which a vessel having high thermal mass relative to the amount of beverage to be introduced into the vessel is cooled through contact with a cooling module to a temperature low enough that a volume of beverage introduced into the vessel is rapidly cooled.

A process is described herein for removing high freeze point hydrocarbons, including benzene compounds, from a mixed feed gas stream. The process involves cooling process streams in one or more heat exchangers and separating condensed compounds in multiple separators to form a methane-rich product gas stream. Select solvent streams from a fractionation train and/or separate solvent streams are employed to lower the freeze point of one or more streams that contain high freeze point hydrocarbons. A corresponding system also is disclosed.

An apparatus and method for flow management and CO2-recovery from a CO2 containing hydrocarbon flow stream, such as a post CO2-stimulation flowback stream. The apparatus including a flow control zone, a gas separation zone, a pretreatment zone, and a CO2-capture zone. The CO2-capture zone is in fluid communication with the pretreatment zone to provide CO2-capture from a pretreated flowback gas stream and output a captured CO2-flow stream. The CO2-capture zone includes a first CO2-enricher and at least one additional CO2 enricher disposed downstream of the first CO2 enricher and in cascading relationship to provide a CO2-rich permeate stream, the CO2-capture zone further including at least one condenser to condense the enriched CO2-stream and output the captured CO2-flow stream.

The end to the fluoride saga in the Southampton city region will put a big hole in the correspondence bag for this paper’s daily letters page.

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This disclosure relates to a garment having zippers for separating the garment into two halves. The garment has a zipper on the front and a zipper on the back. The halves can be mixed and matched according to preference for color, surface ornamentation, or material. Each half has an inside pocket that can be used for storing an additional garment half. The garment may optionally include a hood. In embodiments where the garment has a hood, the back zipper may unzip as the slider is moved in the downward direction, thereby allowing the user to separate the hood and fold the hood into a collar.

Articles of apparel include: (a) a garment structure having one or more fabric elements structured and arranged to provide a close fit to at least one predetermined portion of a body (e.g., area(s) of the body for which enhanced position sensing and/or feedback are desired, such as the lower back, the arch of the foot, etc.); and (b) a body position feedback system engaged with or integrally formed as part of the garment structure. The body position feedback system may apply higher tensile or constricting forces to selected portions of the wearer's body, which can help stimulate or interact with nerves and deep tissue receptors located in various portions of the body. The increased forces at selected locations of the body give the wearer sensory feedback regarding the position or orientation of these parts of the body and can improve or accelerate development of “muscle memory.”

A sleeve gusset for securing an exterior shell layer of an apparel item and an inner liner layer of an apparel item to a sleeve of an apparel item and a method of manufacturing a sleeve gusset is provided. The sleeve gusset comprises an interior facing with a sleeve edge and a body edge and an exterior facing with a sleeve edge and a body edge. The sleeve edge of the exterior facing is coupled to the exterior shell layer of the apparel item while the sleeve edge of the interior facing is coupled to the sleeve. The body edge of the exterior facing is coupled to the body edge of the interior facing. The body edge of the interior facing is further coupled to the inner liner layer.

A bodily support assembly includes a vest that may be worn. A pair of pockets is provided and each of the pockets is coupled to the vest. A pair of panels is provided and each of the panels is removably insertable into an associated one of the pockets. Each of the panels is comprised of a resiliently bendable material. Thus, each of the panels may support the back when the user bends over thereby inhibiting the user from being injured when the user bends over.

Pants are provided with a pair of zippers to facilitate the donning of the pants when a pants wearer is wearing large footwear that the pants wearer does not want to remove prior to donning the pants. Each zipper extends between a front thigh portion of each pant leg, along a side portion of the pant leg and terminates at a free end of the pant leg. Unzipping the zipper creates a large opening at the front thigh portion of each pant leg so that the pants wearer can easily put large footwear through the opening and don the pants. The zippers can be zipped up so that the pants wearer can engage in any desired activity.

A mask coupling apparatus coupled to an outer surface of a helmet and couplings of a mask including an adjusting mechanism comprising a single elastic strap coupled to the mask at both ends via the couplings, where the ends of the elastic strap are free to adjust the length of the mask coupling apparatus.

A YOUNG driver caught with more than 15 times the legal amount of party drug ecstasy in his system has been banned from the roads.

An upper structure for a shoe that improves foot fit and hold of an upper at the time of turn motion. In an upper 2 that covers a foot of a shoe wearer, an expandable part 20 is provided at a midfoot region M that corresponds to a midfoot portion of the foot, and a non-expandable part 21 is provided at a lateral side region and a medial side region except for the midfoot region M. A boundary surface between the expandable part 20 and the non-expandable part 21 is formed by a substantially flat surface. At the boundary surface, respective end portions 20E, 21E of the expandable part 20 and the non-expandable part 21 are sewn together such that a seam does not appear on the boundary surface.

A removable heel connector apparatus comprises a shoe, a heel connector, a heel, a heel release. The heel connector includes a bolt to connect the heel against withdrawal from the shoe. The heel may be withdrawn from the shoe by depressing the heel release. The heel connector also includes a torque balance providing strength and durability in use to a shoe with removable heel as if an ordinary shoe without removable heel.

An article of apparel includes a base layer and an auxetic layer coupled to the base layer. The auxetic layer includes an auxetic structure defining a repeating pattern of shapes, with each of the shapes defined by perimeter walls and an interior recess. The auxetic layer includes a first region and a second region. Each interior recess in the first region provides a void exposing the base layer, and each interior recess in the second region is at least partially filled with a recess material.

A shoe upper comprising a knitted fabric has tubular portions having axial directions parallel to a tongue of the shoe upper, being knitted tubularly, and having shoelace holes. The tubular portions are filled with a filler so that the knitted fabric of the tubular portions is reinforced. The knitted fabric around the shoelace holes may be easily reinforced.

A safety slipper (10) includes a stretchable fabric material upper portion (12) and a porous anti-skid lower portion. The upper portion has a foot opening (16) and a profile heel pocket (17). The lower portion (13) is made from a scrim cloth type material having a knit of polyester threads (21) coated with a soft poly-vinyl chloride outer layer (22). The lower portion provides for a cris-crossing pattern or matrix of interconnected nodes (23) with spaces (24) therebetween.

An article of footwear includes projection members providing sensory feedback. The projection members are movable relative to an upper of the article of footwear. When the upper encounters a surface of an object, the projection members may be displaced in a direction towards wearer's foot. The projection members may be configured so that they are inserted into apertures located on the upper, and extend above an outer surface of the upper.

According to the present invention, a convertible footwear apparatus can be worn as a shoe or converted to a boot by attaching or removing an upper section from the shoe. The apparatus is configured to allow someone wearing the shoe component to attach or remove the upper section with a single continuous operation and without having to remove the shoe component from the wearer's foot. In one embodiment of the invention, the apparatus comprises a zipper. In another embodiment of the invention, the shoe component includes a heel.

An adjustable arch support for a shoe is provided. The adjustable arch support forms a loop within the shoe, surrounding the arch. An end of a band forming the loop within the shoe can be drawn tight, thereby providing additional support for the arch. The end can then be loosened to release the foot or to provide less support.

An apparatus that assists foot movement includes a normally twisted plate configured to interact with the foot. The foot has a pronation axis, and the normally twisted plate is biased and configured to twist about a plate axis that substantially approximates the pronation axis in response to a load received from the foot during foot pronation. As the foot pronates, the plate twists to apply a non-linear force substantially about the plate axis.

The embodiments relate to an article of footwear and method of manufacturing that includes a first layer and a second layer configured to form a plurality of tunnels configured to receive a cord system. The manufacturing includes steps of placing a first layer, placing a cord on the first layer, securing the cord on the first layer, placing a second layer on the first layer and the cord, attaching the second layer to the first layer, and detaching the cord from the first layer. When the cord is secured with a thread, the thread may be removed by dissolving or cutting. The attaching of the second layer to the first layer can be completed by stitching or thermal welding, for example.

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WELL I didn't see that one coming.

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