Continuous-time analog-to-digital converters (ADCs) such as continuous-time delta-sigma ADCs and continuous-time pipeline ADCs, has input resistor structure at the input. The input resistor structure is typically tunable, and the tunability is usually provided by metal-oxide semiconductor field effect transistor (MOSFET) switches. Core MOSFETs, which has a terminal-to-terminal voltage

For continuous-time multi-stage noise shaping analog-to-digital converters (CT MASH ADCs), quantization noise cancellation often requires accurate estimation of transfer functions, e.g., a noise transfer function of the front end modulator and a signal transfer function of the back end modulator. To provide quantization noise cancellation, digital quantization noise cancellation filters adaptively tracks transfer function variations due to integrator gain errors, flash-to-DAC timing errors, as well as the inter-stage gain and timing errors. Tracking the transfer functions is performed through the direct cross-correlation between the injected maximum length linear feedback shift registers (LFSR) sequence and modulator outputs and then corrects these non-ideal effects by accurately modeling the transfer functions with programmable finite impulse response (PFIR) filters.

The disclosure relates to a circuit for stabilizing a digital-to-analog converter reference voltage. One example embodiment is a circuit for stabilizing a voltage on a reference node. The circuit includes a digital-to-analog converter that includes an array of capacitors and arranged for: receiving an input voltage via an input node, receiving a voltage via a reference node and a digital-to-analog code via a controller node, and outputting a digital-to-analog output voltage. The circuit also includes a capacitive network on the reference node comprising a fixed capacitor arranged to be pre-charged to an external reference voltage and a variable capacitor arranged to be pre-charged to an external auxiliary voltage. Further, the circuit includes a measurement block. In addition, the circuit includes a calibration block arranged for determining an updated setting of the variable capacitor based on the digital-to-analog code and the measured voltage on the reference node.

For continuous-time multi-stage noise shaping analog to digital converters (CT MASH ADCs), quantization noise cancellation often requires estimation of transfer functions, e.g., a noise transfer function of the front end modulator. To estimate the noise transfer function, a dither signal can be injected in the front end modulator. However, it is not trivial how the dither signal can be injected, since the dither signal can potentially leak to the back end modulator and cause overall noise degradation. To address some of these issues, the dither signal is injected post the flash analog to digital converter (ADC) of the front end modulator. Furthermore, dummy comparator structures can be used to synchronize the dither with the quantization noise of the targeted flash ADC.

A circuit and a method for converting an analog signal to a digital value representation is disclosed. In one aspect, the circuit includes an incremental sigma-delta analog-to-digital converter (ADC). The circuit further includes a first input line for providing a primary analog signal representing a sensor measurement to the incremental sigma-delta ADC. The circuit further includes a second input line for providing a secondary analog signal to the incremental sigma-delta ADC. The incremental sigma-delta ADC receives the primary and secondary analog signals during a first period (TADC1) and a second period (TADC2), respectively. The circuit further includes a filter configured to weight the digital values in a sequence of digital values output by the incremental sigma-delta ADC, and to output a single digital value representing the sensor measurement.

A remote control for a wireless load control system, the remote control comprising: a housing having a front surface and an outer periphery defined by a length and a width; an actuator provided at the front surface of the housing; a wireless transmitter contained within the housing; and a controller contained within the housing and coupled to the wireless transmitter for causing transmission of a wireless signal in response to an actuation of the actuator, the wireless transmitter and the controller adapted to be powered by a battery contained within the housing; wherein the length and the width of the housing are slightly smaller than a length and a width of a standard opening of a faceplate, respectively, such that the outer periphery of the housing is adapted to be received within the standard opening of the faceplate when the housing and the faceplate are mounted to a vertical surface.

A semiconductor device having an analog/digital conversion circuit converting an analog signal to a digital signal, includes a holding circuit outputting an analog signal having a value according to a value of an analog signal supplied in a first period; and a prediction circuit generating a first digital signal based on bit position information from a prediction table corresponding to the supplied analog signal.

A system of systems to monitor data for carbon flux, for example, at scales capable of managing regional net carbon flux and pricing carbon financial instruments is disclosed. The system of systems can monitor carbon flux in forests, soils, agricultural areas, body of waters, flue gases, and the like. The system includes a means to identify and quantify sources of carbon based on simultaneous measurement of isotopologues of carbon dioxide, for example, industrial, agricultural or natural sources, offering integration of same in time and space. Carbon standards are employed at multiple scales to ensure harmonization of data and carbon financial instruments.

Method for producing a uranium concentrate in the form of solid particles, by precipitation from a uranium-containing solution using a precipitating agent, in a vertical reactor comprising a base, a top, a central part, an upper part, and a lower part, the solid particles of the uranium concentrate forming a fluidized bed under the action of a rising liquid current which circulates from the base towards the top of the reactor successively passing through the lower part, the central part and the upper part of the reactor, and which is created by introducing a liquid recycling current (flow) at the base of the reactor, said liquid recycling current being tapped at a first determined level (A) in the upper part of the reactor and sent back without settling to the base of the reactor, excess liquid being also evacuated via an overflow located at a second determined level (B) in the upper part of the reactor; a method in which the upper limit (C) of the fluidized bed of solid particles is controlled so that it is positioned at a level below the first and second determined levels.

The present invention relates to a process for the wet production of granules from powdered materials, in particular raw materials for the production of glass. The process of the invention comprises the following successive steps: (i) the powdered materials to be granulated are divided into at least two portions: a first portion and a second portion; (ii) a binder liquid is added to the first portion of powdered materials; (iii) the first mixture thus obtained is agglomerated in the granulator in order to obtain granules (a); (iv) the second portion of powdered materials is added to the granulator; and (v) the new mixture obtained is agglomerated in the granulator in order to obtain granules (b). This sequenced granulation process allows granules to be obtained that have a degree of moisture that assures their stability and their ease of handling eliminating the drying step.

A rotating knife is disclosed for disintegrating a crystal bed formed in a washing column for processing suspension of solid particles in a liquid. The rotating knife is provided with a spoke support. The spoke support comprises at least two spokes. The relative angle of the spokes is between approximately 20° and approximately 80°.

Disclosed herein is a method of fabricating a CIS or CIGS thin film, comprising: forming, on a substrate, a seed particle layer comprising copper-indium-compound seed particles comprising copper (Cu); indium (In); and at least one selected from the group consisting of gallium (Ga), sulfur (S) and selenium (Se),applying, on the seed particle layer, a water-soluble precursor solution comprising: a water-soluble copper (Cu) precursor;a water-soluble indium (In) precursor; andat least one selected from the group consisting of a water-soluble gallium (Ga) precursor, a water-soluble sulfur (S) precursor and a water-soluble selenium (Se) precursor, and forming a thin film at high temperature.

Method for the production of a coarse-grained ammonium sulphate product by crystallization and installation for carrying out the method from an ammonium sulphate solution in a DTB type crystallizer having an internal suspension circuit and a clarifying zone, from which a clarified partial flow of solution is constantly drawn off into an external circuit, is heated in a heat exchanger to dissolve the solids contained therein and is guided back as a clear solution into the lower region of the crystallizer. A fine crystal suspension flow is drawn off from the clarifying zone as a further partial flow and guided back into the internal circuit of the crystallization stage without any previous dissolution of the solid proportion contained therein.

The invention provides a process comprising: a crystallization step of concentrating and crystallizing the ammonium salt of sulfuric acid from an aqueous solution that contains the ammonium salt of sulfuric acid; a solid-liquid separation step of solid-liquid separating the ammonium salt of sulfuric acid obtained in the crystallization step, and a crystallization mother liquid recycling step of recycling a crystallization mother liquid obtained in the solid-liquid separation step to at least one step selected from the crystallization step and one or more steps that precede the crystallization step, in which not all of the crystallization mother liquid is recycled.

Mineral, cosmetic, pharmaceutical, agricultural, nutraceutical, and other compositions are produced using a mineral composition containing minimal concentrations of cadmium, lead, arsenic, and mercury and containing relatively high concentrations of micro and macro mineral elements, of rare earth elements, of calcium, and of silica. The mineral concentrations are produced by processing naturally occurring clay soil to concentrate mineral elements naturally occurring in the soil.

A method of producing a surface-treated carbon black powder dispersion includes subjecting carbon black fine particles having a volume average particle size of 100 nm to 20 μm to wet granulation and drying by heating to obtain granulated carbon black having a hardness of 12 cN or less and a pH of less than 7, grinding the granulated carbon black to obtain a ground product having a volume average particle size of 20 nm to 20 μm, and subjecting the ground product to wet oxidization in an aqueous medium. The resulting surface-treated carbon black powder dispersion exhibits excellent print density, print quality, discharge stability, and storage stability when used as an inkjet printer aqueous black ink.

This invention relates to novel methods for affecting, controlling and/or directing various crystal formation, structure formation or phase formation/phase change reaction pathways or systems by exposing one or more components in a holoreaction system to at least one spectral energy pattern. In a first aspect of the invention, at least one spectral energy pattern can be applied to a crystallization reaction system. In a second aspect of the invention, at least one spectral energy conditioning pattern can be applied to a conditioning reaction system. The spectral energy conditioning pattern can, for example, be applied at a separate location from the reaction vessel (e.g., in a conditioning reaction vessel) or can be applied in (or to) the reaction vessel, but prior to other (or all) crystallization reaction system participants being introduced into the reaction vessel.

A process for producing granules containing one or more complexing agent salts of the general formula from an aqueous starting solution, containing the one or more complexing agent salts in a concentration of from 10 to 80% by weight, based on the total weight of the aqueous starting solution, in a jet apparatus.

The present invention pertains to a process for producing sodium chloride comprising the steps of (i) preparing a brine comprising at least 150 g/l of sodium chloride by dissolving a sodium chloride source in water, (ii) subjecting the resulting brine to a eutectic freeze crystallization step by indirect cooling of said brine, resulting in the formation of ice, sodium chloride dihydrate, and a mother liquor, (iii) separating the sodium chloride dihydrate formed in step (ii) from the ice and optionally mother liquor at the eutectic temperature, such that a sodium chloride dihydrate-rich stream is formed, and (iv) feeding said sodium chloride dihydrate-rich stream to a recrystallizer to form sodium chloride and a mother liquor.

The present invention relates to compositions and methods to increase the output of a high quality product from the precipitation liquor crystallization process exemplified through the aluminum hydroxide recovery processes such as the Bayer process. The invention is a method of increasing the size of precipitates from a liquor. The invention in one embodiment relates to the use of a crystal growth modifier compositions added to the precipitation process to increase the particle size distribution of the precipitated alumina trihydrate.

Aspects of the present invention relate to a process to obtain potassium chloride that includes submitting brine to concentration, separating brine after concentration, resulting in a first solid content and a first liquid content, cooling the first liquid content, separating the first liquid content after cooling, thus resulting in a second solid content and a second liquid content, enriching the second solid content, and separating the second solid content after enrichment, thus resulting in a third solid content and a third liquid content. Aspects of this process are environmentally safe, as the process includes stages using solvents and equipment which does not harm the environment. Moreover, aspects of this process present a significant energy consumption reduction.

The present invention relates to a process for the preparation of granules comprising the steps of: providing a granulation zone comprising particles, the particles being kept in motion; providing a first feed stream comprising a liquid composition into the granulation zone, the liquid composition being applied onto or over the moving particles in the granulation zone; withdrawing a product stream comprising granules from the granulation zone, the granules being the result of layered growth of the moving particles in the granulation zone; wherein a second feed stream comprising granulation nuclei is fed into the granulation zone, wherein the granulation nuclei have a particle size distribution characterized by a standard deviation of the particle size that is less than 15% of the mean particle size, and wherein the second feed stream comprises between 0.05 wt % and 50 wt % of the product stream.

A process for the production of sodium carbonate and sodium bicarbonate out of trona, comprising crushing trona ore and dissolving it in a leaching tank containing a solution comprising sodium carbonate and sodium bicarbonate, and an additive selected from the group consisting of: phosphates, phospholipids, carboxylates, carboxilic acids, and combinations thereof, saturated in sodium bicarbonate, in order to produce solid particles suspended in a production solution comprising sodium carbonate, the solid particles containing insoluble impurities and at least 65% by weight of sodium bicarbonate. The solid particles are separated from the production solution containing sodium carbonate. At least part of the production solution containing sodium carbonate is taken out of the leaching tank.

A method for making an agglomerate of an ore is disclosed. The method comprises contacting the ore with an acid solution and a stucco binder. The stucco binder may include calcium sulfate hemihydrate. The ore agglomerate may include ore, acid solution, and stucco-derived gypsum.

A system and a method are provided that take a potentially dangerous waste product and process the product to create a marketable asset. The system and method are configured to create “tb” from “tbgs” by removing the volatility that exists in the “tbgs.” The resultant “tb” may be substantially non-volatile.

The present invention pertains to a process for producing sodium chloride comprising the steps of: (i) preparing a brine having a sodium chloride concentration which is higher than the sodium chloride concentration of the eutectic point but lower than the sodium chloride concentration of a saturated brine by dissolving a sodium chloride source in water; (ii) cooling the resulting brine by indirect cooling in a self-cleaning fluidized bed heat exchanger/crystallizer to a temperature lower than 0° C. but higher than the eutectic temperature of the resulting brine, thereby forming a slurry comprising sodium chloride dihydrate and a mother liquor; (iii) feeding the sodium chloride dihydrate to a recrystallizer to form sodium chloride and a mother liquor, and (iv) recycling at least part of the mother liquor obtained in step (ii) and/or step (iii) to step (i).

An object of the present invention is to provide a method for producing composite carbon fibers in which two or more carbon fibers are dispersed in a nearly homogenous state, the composite carbon fibers capable of being easily dispersed in a matrix such as a resin without leaving aggregate, and imparting low resistance. Disclosed is a method for producing composite carbon fibers, which comprises imparting a cavitation effect to slurry containing 6% by mass or less of two or more carbon fibers each having a different average fiber diameter under a pressure of 100 MPa or more and less than 245 MPa thereby to form a composite.

The present invention relates to a process for the preparation of articles of manufacture made of or based on sulphur, which comprises cooling of liquid sulphur in a volume of containment until the sulphur mass solidifies and forming of the product, characterized in that elastic pressure waves are applied to the cooling mass of liquid sulphur to produce a crystalline suspension of solid sulphur in liquid sulphur.

Process for the combined regeneration of at least two soluble salts contained in a residue of an industrial process comprising heavy metals, comprising: adding an amount of reactive aqueous solution needed to completely dissolve the salts which are desired to be regenerated to the residue; subjecting the resulting aqueous suspension to a separation to obtain an aqueous production solution on the one hand and insoluble impurities on the other hand, which are removed; successively subjected the aqueous production solution to at least two selective crystallization steps intended to crystallize, separately, the at least two soluble salts which are desired to be regenerated, which are washed, dried and regenerated separately; and adjusting the concentration of at least one of the soluble salts to be regenerated in the aqueous production solution, at the moment when such solution is subjected to the step of crystallization of this salt, to give rise to the selective crystallization of this salt, by addition of a controlled amount of this salt to the aqueous production solution upstream of the crystallization step.

A device for taking up a silicon melt comprises at least one block of a refractory with a capillary structure.

Provided is a method and an apparatus for purifying potassium nitrate from the solid waste produced by a chemical glass-strengthening process. In the method, the solid waste is melted into a liquid waste at first. Potassium nitrate of various purity grades can be obtained by batch processing the liquid waste through stepwise cooling processes of cooling the liquid waste to a first temperature facilitating the potassium nitrate contained in the liquid waste to be crystallized at a first rate and then cooling the liquid waste to a second temperature close to the freezing point of the potassium nitrate at a second rate that is slower than the first rate. The recovered potassium nitrate from the solid waste can be recycled and reused.

Methods and apparatus for precipitating dissolved materials from a solution involve reduction of fines. In an embodiment, the method comprises: introducing a solution into a reactor, causing the dissolved materials in the solution to precipitate into crystals under a first reaction condition, adjusting the reaction condition from the first reaction condition to a second reaction condition, maintaining the reaction condition in the second reaction condition to cause a sub-population of the crystals to dissolve, and adjusting the reaction condition from the second reaction condition to the first reaction condition. In an embodiment, the apparatus comprises a reaction tank, a recycling path and at least an acid injector which is configured for dosing an acid into solution flow in the recycling path.

An application of carbon nanotubes on agglomerates of ore fines to increase the mechanical strength is provided. A process for the preparation of ore agglomerates having enhanced mechanical strength by the application of the carbon nanotubes is also provided.

A production saltwater disposal facility comprising a separator configured to receive production saltwater from a pipeline or a vehicle and separate hydrocarbons from the production saltwater, wherein the production saltwater received from the pipeline or vehicle is substantially the same composition as when the production saltwater was located in a subterranean formation, a hydrocarbon storage tank configured to receive hydrocarbons from the separator, a settling pit configured to receive the production saltwater from the separator and separate metals and/or other solids from the saltwater, an evaporator in fluid communication with the settling pit and comprising a nozzle configured to emit a stream of the saltwater along a path in air such that water in the saltwater evaporates, and a collection pit positioned under the path and configured to collect the salt from the saltwater after the water has evaporated.

The present invention provides a kiln for the combustion of agricultural waste. The kiln includes a central cylindrical combustion chamber. The central cylindrical combustion chamber includes a system for the control of combustion air to the combustion chamber. The kiln includes a second concentric cylinder surrounding the central cylindrical combustion chamber. The second concentric cylinder includes a system for the flow of cooling water through the first annulus between the central cylindrical combustion chamber and the second concentric cylinder. The kiln includes a system for the feeding of the agricultural waste into the central combustion chamber. The kiln includes a temperature sensing device to measure and display the temperature within the central combustion chamber during the combustion of the agricultural waste. The kiln includes a system for the recovery of ash from the kiln. In operation, the temperature of combustion is controlled to between 550° C. and 650° C. by a combination of increasing the supply of combustion air when the temperature in the central combustion chamber falls to near 550° C. and the introduction of cooling flowing water when the temperature in the central combustion chamber approaches 600° C.

The Damn Virus: Local governments await budget slaughter; supes to investigate county hospital. Local governments across the East Bay are now entering budget season. Alameda County Administrator Susan Muranishi is expected to provide the Board of Supervisors with an update on the Fiscal Year 2020-21 budget this week.…

More than a month since officials closed schools due to Covid-19, California leaders said a two-week blitz led by First Partner Jennifer Siebel Newsom has brought in 70,000 computers and other devices that will be distributed to needy students this week. Gov. Gavin Newsom has stressed the importance of distance learning and education multiple times during the past month—even talking about helping his own children with school work.…

It might just be a distinction without a difference. Is cannabis really an "essential" business? The food business obviously is. But the legal cannabis industry didn't exist a few years ago, while gathering and making food — contrary to the popular cliché about prostitution — is the world's oldest profession.…

The invention relates to a stator for an electro-mechanical wave motor and an electro-mechanical wave motor including such stator. The stator includes a plurality of actuators positioned along a closed travelling path on at least a first side of the substrate. The plurality of actuators is configured to generate a travelling wave along the closed travelling path. The substrate has an outer periphery structure and an inner periphery structure and a plurality of rigid outer bridge structures and at least one rigid inner bridge structure. Each of the rigid outer bridge structures extends from the outer periphery structure and outwards and is connected to or adapted to be connected to an outer stabilization member and the at least one rigid inner bridge structure extends from the inner periphery structure and inwards and is connected to or is adapted to be connected to an inner stabilization member.

An electrical voltage-generating piezoelectric device comprising at least a first blade (1) with a curved portion (10) defining a first arm (11) and a second arm (12) of the blade, the first arm (11) being intended to be fastened to a fixed support, the second arm (12) being substantially flat and having a free end (120) designed to oscillate around its resting position under the effect of mechanical force, at least one piezoelectric element (31) resting upon one of the main surfaces (14) of the second arm (12) of the first blade. The device also includes a second blade (2) identical in structure to the first blade (1), the first arms (11, 21) of the first and second blades (1, 2) being fastened together on all or part of their surfaces and being fixed relative to each other.

An acoustic resonator and a method of manufacturing the same are provided. An acoustic resonator includes a resonating part disposed on a substrate, a cap accommodating the resonating part and bonded to the substrate, and a bonded part bonding the cap and the substrate to each other, the bonding part including at least one block disposed between a bonding surface of the cap and a bonding surface of the substrate to block a leakage of a bonding material that forms the bonded part during a bonding operation.

A resonator is provided that suppresses vibration of a retainer caused by undesired vibration of a vibrating portion and also achieves size reduction. Specifically, the resonator includes a vibrating member that includes a semiconductor layer, a first piezoelectric film formed on the semiconductor layer, and a first upper electrode formed on the first piezoelectric film. Moreover, a retainer is provided to retain the vibrating member such that the vibrating portion can vibrate and one or more coupling members are provided to couple the vibrating member to the retainer. Finally, the resonator includes a vibration suppressing member that includes a second piezoelectric film formed on the retainer and a second upper electrode formed on the second piezoelectric film.

An acoustic resonator and a method of manufacturing the same are provided. The acoustic resonator includes a resonating part including a first electrode, a second electrode, and a piezoelectric layer; and a plurality of seed layers disposed on one side of the resonating part.

An acoustic resonator structure comprises: a substrate having a cavity, which has a plurality of sides; a first electrode disposed over the cavity; a piezoelectric layer disposed over a portion of the first electrode and extending over at least one of the sides; and a second electrode disposed over the piezoelectric layer, an overlap of the first electrode, the piezoelectric layer and the second electrode forming an active area of the FBAR. The active area of the FBAR is completely suspended over the cavity.

In a method of manufacturing a piezoelectric device in which a piezoelectric thin film on which functional conductors are formed is fixed to a support substrate by a fixing layer, an alignment mark is formed on one main surface of a light-transmitting piezoelectric substrate. A sacrificial layer is formed on a main surface of the piezoelectric substrate with reference to the alignment mark and the fixing layer is formed so as to cover the sacrificial layer and is bonded to the support substrate. The piezoelectric thin film is formed by being separated from the piezoelectric substrate and the functional conductors are formed on the surface of the piezoelectric thin film with reference to the alignment mark. The piezoelectric device is able to be manufactured while positions of formation regions of conductors are adjusted efficiently.

A resonator is provided that suppresses frequency variations with etching without decreasing the strength of vibration arms. The resonator includes a base portion, a first vibration portion extending from the base portion in a first direction and having a first width, and a second vibration portion extending from the base portion in the first direction with a first gap between the first and second vibration portions and having the first width. The first and second vibration portions perform out-of-plane bending vibration with opposite phases at a predetermined frequency. The predetermined frequency varies in accordance with the first width and the first gap. The ratio of the first gap to the first width is within a range that causes an absolute value of rates of variations in the predetermined frequency with respect to variations in the first width and in the first gap to be not more than about 100 ppm.

Provided is a garment generating electricity which transforms kinematic energy generated when a user wearing the garment walks and/or swings arms past torso to an electric energy, and has a simple structure and is produced at low cost, and realizes excellent electricity generation efficiency. A garment generating electricity from ambulation or aim swinging past torso or both includes a magnet member arranged on a first part of a garment to generate magnetic field, a coil member provided on a second part of the garment which reciprocally moves with the first part of the garment while walking or swinging aims past torso, the coil member generating electricity from the magnetic field of the magnet member, and a storage battery charged with the electricity generated by the coil member.

A motorization apparatus for a motorized wheel comprises an axle secured to a frame of a vehicle. A rotor unit has poles of magnet material. A stator unit having slots and teeth secured to the axle is inward of said rotor to define a clearance gap therewith such that the rotor unit is rotatable about the stator core. An arrangement of coils is wound around the teeth of the stator unit, the coils adapted to be powered to induce a rotation of the rotor unit relative to the stator unit. A structure comprises hub portions rotatably mounted to the axle, the structure having lateral walls defining an inner volume for the rotor unit and the stator unit, the structure supporting the rotor unit. The structure comprises attachment members connected to spokes of the motorized wheel, located radially inward of the clearance gap between the rotor unit and the stator unit.

A displacement sensor having a rectangular shaped elastic member. A piezoelectric element is attached to a first main face of the elastic member. The piezoelectric element has a rectangular-shaped piezoelectric sheet and electrodes on both main faces of the piezoelectric sheet. The piezoelectric sheet is made of poly-L-lactic acid and is at least uniaxially-stretched. The piezoelectric element is attached so that the uniaxial-stretching direction of the piezoelectric sheet is 45° relative to a long-side direction of the elastic member. When the elastic member is bent along the long-side direction, the piezoelectric sheet is stretched along the long-side direction, and the piezoelectric element generates voltage of predetermined level.

A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.