An apparatus and method for spooling wire or cable from a reel assembly. In one embodiment, the apparatus comprises an inner flange assembly and an outer flange assembly. The inner flange assembly is capable of freely rotating relative to the outer flange assembly for spooling wire from any surface. In another embodiment, wire is spooled from a reel assembly comprising an inner flange assembly and an outer flange assembly.

A wire electric discharge machining apparatus according to embodiments includes a wire electrode, a wire supplying unit that supplies the wire electrode, a collecting motor that collects the wire electrode at a predetermined speed, a tension motor that controls a tension of the wire electrode between the wire supplying unit and the collecting motor, a speed calculating unit that calculates a traveling speed of the wire electrode at a predetermined time interval, a speed storing unit that stores the traveling speed calculated by the speed calculating unit, a differential speed calculating unit that calculates a differential speed between a current traveling speed output from the speed calculating unit and a past traveling speed stored in the speed storing unit, and a breakage detecting unit that detects breakage of the wire electrode by comparing the differential speed with a predetermined threshold.

A roll sheet supporting apparatus includes a pair of rotation shafts which are respectively fitted into end portions of the hollow portion of the core tube and configured to support the roll sheet rotatably and capable of being drawn out, an engaging member movable between a projecting position and a retracting position, wherein the engaging member projects from an outer circumferential surface of the each rotation shaft abutting on the core tube to engage with the core tube at the projecting position and retracts inward from the outer circumferential surface of the each rotation shaft at the retracting position, and an engaging member moving unit configured to move the engaging member between the projecting position and the retracting position.

To provide a medium storing and advancing apparatus for inhibiting rotation of a drum when tapes are completely rewound from the drum. The apparatus includes reels supplying and winding up the tapes, a drum winding up the tapes supplied from the reels or rewinding wound-up tapes to supply the tapes to the reels, and an inhibiting mechanism inhibiting further rotation of the drum in a direction of rewinding the tapes when the drum completely rewinds the tapes, whereby the inhibiting mechanism inhibits the rotation of the drum.

A fishing line reeling apparatus for loading a spool of fishing line about a reel of a fishing pole includes a clamp capable of being anchored to a ledge of an existing support surface, and a bracket attached to the clamp wherein the bracket has a dowel capable of rotatably receiving and suspending the existing spool of fishing line above the existing support surface. An arm is located subjacent to the dowel and statically mated to the bracket. The arm has an eyelet attached to a distal end thereof such the fishing line is downwardly guided from the spool and urged along a longitudinal length of the arm prior to passing through the eyelet.

The present invention provides a technique which can disassemble a mandrel having a substantially cylindrical shape and being dividable into a plurality of segments, easily and efficiently. The disassembling method comprises, in the mandrel adhesively attached with a composite material structure on an outer peripheral surface thereof, a rotation step of rotating the pair of support rings along with the mandrel to position a segment which is a detached target to an uppermost portion; and a segment detaching step of detaching the segment which is the detached target positioned at the uppermost portion, from the pair of support rings; wherein in the segment detaching step, the segment which is the detached target is moved in a vertically downward direction to a position inside of the mandrel, between the pair of support rings, and is carried out from between the pair of support rings.

A sheet conveyance unit for transporting a sheet unreeled from a roll of paper includes a roll holder including a pair of supporters to support both axial end portions of the roll, movable in an axial direction of the roll, a pair of first conveyance rollers, a pair of second conveyance rollers, a tensioner to tension the sheet, disposed between the first conveyance rollers and the second conveyance rollers, and a tension adjustment unit. The tensioner includes a contact plate to press against the sheet, extending over an entire width of the sheet and pivotably supported on a casing of the sheet conveyance unit. The tension adjustment unit changes the tension of the sheet by adjusting a force to press the contact plate against the sheet and includes a first adjuster to change the tension of the sheet in conjunction with the interval between the supporters.

A filament winding apparatus prevents a fiber bundle supplied to a liner from interfering with other fiber bundles and fiber supplying guides. First and second guide units include a plurality of fiber supplying guides arranged radially and extending and contracting in a direction approximately perpendicular to a liner central axis. When a fiber bundle supplied from a first supplying guide of the first guide unit crosses between a second supplying guide of the second guide unit and the liner, the distance from the second supplying guide to the liner central axis is made larger than the distance from the first supplying guide to the liner central axis, and in the reverse case, the distance from the first supplying guide to the liner central axis is made larger than the distance from the second supplying guide to the liner central axis.

A web rewinding apparatus having a mandrel cupping assembly for releaseably engaging unsupported ends of a plurality of mandrels is disclosed. Each of the plurality of mandrels extends generally parallel to the web winding turret assembly axis. Each of the mandrels is driven in a closed mandrel path about the web winding turret assembly axis. The mandrel cupping assembly comprises a cupping arm turret having a cupping arm turret central axis, a mandrel cup cooperatively associated with each mandrel of the plurality of mandrels, at least three motion limiting devices disposed upon the cupping arms, and a first actuator.

The wire winding apparatus includes: a wire feeding member provided to a supporting member so as to be operable, for feeding a wire; a lock mechanism capable of inhibiting an operation of the wire feeding member; a winding mechanism for rotating a core about an axis thereof to wind the wire fed from the wire feeding member around the outer circumference of the core; a feed mechanism for moving the supporting member in an axial direction of the core in synchronization with the winding performed by the winding mechanism; a proximity sensor for detecting a movement amount of the wire feeding member with respect to the supporting member; and a control section for controlling an operation of the feed mechanism to adjust a movement amount of the supporting member moved by the feed mechanism based on a detection output from the proximity sensor.

A media spindle apparatus for supporting a media roll having media to be delivered to a printing apparatus. The apparatus includes a spindle configured to support the roll. The spindle defines an axial direction about which the roll rotates relative to the printing apparatus to deliver the media to the printing apparatus. A guide member is supported by the spindle and guides the media to the printing apparatus. The guide member is positionable in a first configuration in which a securing mechanism is disengaged and the guide member is translatable substantially in the axial direction relative to the spindle. The guide member is pivotable about the axial direction relative to the spindle to move to a second configuration and thereby engage the securing mechanism to inhibit the guide member from translating in the axial direction relative to the spindle and pivoting from the second configuration to the first configuration.

A filament winding apparatus prevents a fiber bundle supplied to a liner from interfering with other fiber bundles and fiber supplying guides. First and second guide units include a plurality of fiber supplying guides arranged radially and extending and contracting in a direction approximately perpendicular to a liner central axis. When a fiber bundle supplied from a first supplying guide of the first guide unit crosses between a second supplying guide of the second guide unit and the liner, the distance from the second supplying guide to the liner central axis is made larger than the distance from the first supplying guide to the liner central axis, and in the reverse case, the distance from the first supplying guide to the liner central axis is made larger than the distance from the second supplying guide to the liner central axis.

A method and apparatus for automating some of the tasks that heretofore required operator action at headland turns or similar events are provided. The present invention automates operation of lift assist wheels and/or gull wings, such as those found on a stack-fold implement, based on the position of the tractor hitch to which the implement is coupled. An operator may control the position of the implement, such as at a headland turn, by raising and lowering the tractor hitch using a remote control. The invention enables the planter to compare the tractor hitch position relative to an implement position and control operation of the implement accordingly without additional user inputs.

A seed metering assembly for a farm implement has a meter roller that can be accessed and removed in a relatively quick manner. The seed metering assembly includes a fluted meter roller that is segmented into a number of discrete fluted sections. Each fluted section has an associated flow control member that is selectively operable to impede the flow of granular material from a seed hopper to its corresponding section of the fluted meter roller.

The present invention is directed to a hopper for a seed metering system that has a series of individualized and independently controlled metering units. The hopper has a plurality of discharge openings that can be selectively opened and closed to expose an opening to a respective one of the plurality of metering units. Each seed metering unit is selectively driven by a common drive member, such as a drive shaft. When a seed metering unit is engaged with the drive member, the unit will meter granular material. On the other hand, when the seed metering unit is not engaged with the drive member, the metering unit will not meter granular material. Hence, the present invention provides a seed metering apparatus that provides effective sectional control.

Agricultural seed planting systems are provided. In some aspects, the system includes a processing unit, a frame, a furrow opener coupled to the frame for opening a furrow in soil, and a sensor in communication with the processing unit and adapted to sense a characteristic associated with seed planting. The sensor may generate a signal associated with the sensed characteristic and the processing unit may receive the signal. In some aspects, the sensed characteristic may be either a soil characteristic or a seed characteristic. Information associated with the sensed characteristic can be saved in memory for future use and to assist with more effective planting in the future.

Referring to the drawings, wherein like reference numerals designate identical or corresponding parts throughout the several views, FIG. 1 illustrates a side elevation view of a single row unit (10) of a conventional row crop planter such as the type disclosed in U.S. Pat. No. 7,438,006, the disclosure of which is hereby incorporated herein in its entirety by reference. As is well known in the art, the row units (10) are mounted in spaced relation along the length of a transverse toolbar (12) by a parallel linkage (14), comprised of upper and lower parallel arms (16, 18) pivotally mounted at their forward ends to the transverse toolbar (12) and at their rearward end to the row unit frame (20).

A no-till apparatus for application of herbicide and fertilizer, soil preparation, and seeding of a cover crop in a standing crop has inter-row assemblies configured to pass along inter-row areas between adjacent row lines of standing crop plants. Each assembly includes a fertilizer applicator, a no-till soil preparation element, a cover crop seed applicator, and a post-seeding element.

Disclosed are apparatus and method for decontaminating and sterilizing chemical and biological agents, which can efficiently decontaminate and sterilize high precision electronic devices, communication devices, computers or inside of vehicles and air planes contaminated with chemical and biological agent by using mixture of non-thermal atmospheric pressure air plasma and oxidizing peroxide vapor. The apparatus according to the present invention comprises a decontamination and sterilization chamber 10; a first fluid supplying line L1 and a second fluid supplying line L2, which are installed in the form of closed circuit between the inlet 11 and outlet 12 of the decontamination and sterilization chamber 10; a peroxide vapor supplier which is installed on the first fluid supplying line; and a non-thermal atmospheric pressure air plasma reactor 70 which is installed on the second fluid supplying line L2.

An alignment film forming apparatus and a method are provided to form an alignment film for a liquid crystal in a single process of simultaneously executing a film deposition process of ion beam sputtering and an alignment process. The method greatly restricts the size of a substrate. An alignment film forming apparatus includes a target disposed on a top surface side of a substrate and having a sputtering surface defining a sharp angle to the top surface of the substrate, a transfer table that transfers the substrate in a predetermined direction, and an ion source disposed on the top surface side of the substrate in such a way that an ion beam is irradiated on the sputtering surface of the target. An ion beam reflected at the sputtering surface is irradiated on a sputtering film formed on the substrate. The apparatus includes a mask disposed in such a way as to cover a part of the top surface of the substrate on an upstream side of a position where the sputtering film is formed, and a temperature regulator which regulates the temperature of the target.

A reactive sputtering apparatus includes a chamber, a substrate holder provided in the chamber, a target holder which is provided in the chamber and configured to hold a target, a deposition shield plate which is provided in the chamber so as to form a sputtering space between the target holder and the substrate holder, and prevents a sputter particle from adhering to an inner wall of the chamber, a reactive gas introduction pipe configured to introduce a reactive gas into the sputtering space, an inert gas introduction port which introduces an inert gas into a space that falls outside the sputtering space and within the chamber, and a shielding member which prevents a sputter particle from the target mounted on the target holder from adhering to an introduction port of the reactive gas introduction pipe upon sputtering.

Provided is a sputtering apparatus which deposits a metal catalyst on an amorphous silicon layer at an extremely low concentration in order to crystallize amorphous silicon, and particularly minimizes non-uniformity of the metal catalyst caused by a pre-sputtering process without reducing process efficiency. This sputtering apparatus improves the uniformity of the metal catalyst deposited on the amorphous silicon layer at an extremely low concentration. The sputtering apparatus includes a process chamber having first and second regions, a metal target located inside the process chamber, a target transfer unit moving the metal target and having a first shield for controlling a traveling direction of a metal catalyst discharged from the metal target, and a substrate holder disposed in the second region to be capable of facing the metal target. A distance difference between a linear distance, which is a distance between a substrate loaded on the substrate holder and the metal target, and a length of the first shield is less than 3 cm.

Methods and systems for measuring the oxidation-reduction potential of a fluid sample are provided. The system includes a test strip with a sample chamber adapted to receive a fluid sample. The sample chamber can be associated with a filter membrane. The test strip also includes a reference cell. The oxidation-reduction potential of a fluid sample placed in the sample chamber can be read by a readout device interconnected to a test lead that is in electrical contact with the sample chamber, and a reference lead that is in electrical contact with the reference cell. Electrical contact between a fluid sample placed in the sample chamber and the reference cell can be established by a bridge. The oxidation-reduction potential may be read as an electrical potential between the test lead and the reference lead of the test strip.

The present invention provides methods, devices, and kits for separating and selecting top sperm from a sperm sample of a subject. In one aspect, for example, such a method can include removing a portion of negatively charged protein from sperm in the sperm sample, immobilizing the sperm, electrophoretically separating the sperm, and selecting mature sperm based on electromotility properties.

The present invention is configured to be provided with: a bottom-equipped tubular cell main body that forms an internal space S1 that extends in a longer direction, and has one end part that is opened; a pair of applying electrodes that are arranged so as to face to each other in the internal space; and a fixing spacer that intervenes between the pair of applying electrodes to thereby define a distance between the applying electrodes, and fixes the pair of applying electrodes, wherein in a state where the fixing spacer is inserted into the cell main body, in a lower part of the internal space of the cell main body, a zeta potential measuring space in which the pair of applying electrodes are exposed is formed.

Methods and apparatus for applying pulsed DC power to a plasma processing chamber are disclosed. In some implementations, frequency of the applied power is varied to achieve desired processing effects such as deposition rate, arc rate, and film characteristics. In addition, a method and apparatus are disclosed that utilize a relatively high potential during a reverse-potential portion of a particular cycle to mitigate possible nodule formation on the target. The relative durations of the reverse-potential portion, a sputtering portion, and a recovery portion of the cycle are adjustable to effectuate desired processing effects.

The present invention provides a manufacturing apparatus which can realize so-called sequential substrate transfer and can improve throughput, even when one multi-layered thin film includes plural layers of the same film type. A manufacturing apparatus according to an embodiment of the present invention includes a transfer chamber, three sputtering deposition chambers each including one sputtering cathode, two sputtering deposition chambers each including two or more sputtering cathodes, and a process chamber for performing a process other than sputtering, and the three sputtering deposition chambers, the two sputtering deposition chambers, and the process chamber are arranged around the transfer chamber so that each is able to perform delivery and receipt of the substrate with the transfer chamber.

A well, in particular an open well (14) with an upper end having a vertical axis (101), for containing a liquid and particles contained within said liquid, characterized by comprising at least two manipulation electrodes (1, 2, 3, 31, 32, 36, 17, 40, 41) able to be powered by electrical voltages, in particular alternating electrical voltages, so as to manoeuvre particles within the well by means of the dielectrophoretic effect. A platform comprising a plurality of wells as described above and a method for using said well.

A method to collect soil cores from a green comprises the steps of providing a soil core collector, extracting soil cores from a green, allowing the cores to dry for at least fifteen minutes, and utilizing the core collector to gather the cores from the green.

An agricultural system includes an agricultural row unit movable on a field between a first soil condition and a second soil condition, the first soil condition having a different soil hardness than the second soil condition. A down-pressure actuator applies an initial first pressure associated with the first soil condition. A soil-hardness sensing device is positioned at a distance D forward of the row unit and outputs a soil-hardness change signal when detecting a change from the first soil condition to the second soil condition. At least one memory device stores instructions that, when executed by at least one processor, cause the down-pressure actuator to change, in response to receiving the soil-hardness change signal, the initial first pressure to a different second pressure when the row unit encounters the second soil condition.

A swing control apparatus and a swing control method for a construction machine are provided. The swing control apparatus includes a start position estimation unit, a stop target position calculation unit, and a swing motor position control unit. Even if an operator releases a lever or commands a stop at different times, an upper swing structure of the construction machine (for example, excavator) can be stopped within a predetermined range, and thus the inconvenience caused by an additional driving operation, which is required as the stop position differs according to the time point where the stop command starts, can be solved.

A turf cutter device, an infill extractor/collector device, and a turf wind-up device are used to facilitate the cost-effective removal of an infilled synthetic turf and the subsequent installation of a new turf at the same site, with minimal subsurface disruption. An infill extractor/collector device mounted on a motorized vehicle moves a relatively narrow strip of filled artificial turf from the surface, in front of the vehicle, and directs the strip to an infill removal station. The infill removal station inverts the strip and redirects the strip back toward the front of the vehicle, after agitating the strip to extract the infill. After redirecting the strip toward the front of the vehicle, the vehicle drives over the unfilled strip. Meanwhile, the extractor/collector device moves the extracted infill rearwardly to a bag located in a trailer. The turf cutter device is used prior to infill extraction, while the turf wind up device may be used before or after infill extraction, depending on whether infill extraction takes place at the field or at a remote site, respectively.

An apparatus for servicing roadways includes a frame configured to be secured to a prime mover. The apparatus further includes a grinding drum rotatably supported upon the frame. The apparatus still further includes a driving system supported upon the frame and configured to rotationally drive the grinding drum.

An apparatus for extracting and collecting particulate infill from an infilled artificial turf field. A vehicle has a first forward end and a second rearward end. An infill extractor is located at the first end of the vehicle and adapted to extract infill from a strip of infilled athletic turf. Extracted infill falls into a bottom section of the infill extractor. An infill mover is secured to the vehicle and adapted to move the extracted infill from the bottom section of the infill extractor toward the second end of the vehicle. An infill collector is connected to the second end of the vehicle and operable to cooperate with the infill mover to collect the moved infill. The infill collector includes a frame that is laterally movable relative to the vehicle from an operative “in use” position to a stowed position.

A seat cushion airbag apparatus is applied to a vehicle seat including a seat unit having a seat cushion supported, from a lower side thereof, by a supporting portion of a seat frame, and an air blowing duct having a blow-out port below the seat cushion, wherein a conditioning air flowing through the air blowing duct is blown out upward from the blow-out port. An inflator is disposed at a location, which is spaced from the blow-out port in a front and rear direction of a vehicle, and an airbag is inflated between the supporting portion and the seat cushion by an inflation gas supplied from the inflator so that a seat face of the seat unit is raised to prevent a subject to be restrained on the seat unit from being moved forward.

A device for use in a vehicle steering system, said device comprising at least one actuator affixed to a wheel linkage of at least one wheel of said vehicle steering system. The actuator comprises a rotation assembly engagable with a first wheel linkage segment, an electric motor for actuating movement of the rotation assembly via a gear box and one or more sensors integrally contained in the actuator for sensing one or more parameters selected from the group consisting of force, speed, turns and rotation. Rotation of the rotation assembly actuates linear movement of said first wheel linkage segment into and out of said actuator to thereby adjust one or more wheel parameters of said at least one wheel, and wherein said one or more sensors provide real time data to an actuator control unit integral to said actuator to self-adjust rotational parameters of said rotation assembly.

An airbag apparatus for vehicle includes: an airbag body formed by joining outer peripheral portions of two base cloths, the two base cloths being superimposed on each other; an inflator introducing gas to an inside of the airbag body; and a vent hole formed on the airbag body and configured of a slit, the vent hole communicating between the inside and an outside of the airbag body, the slit being formed so as to be directed from the outer peripheral portions toward central portions of the two base cloths over the two base cloths.

Construction is achieved that is capable of maintaining the holding force by which a support bracket 12a holds an outer column 13a. One pivoting friction plate 25 for telescopic mechanism is held between the inside surface of a support plate section 20a of the support bracket 12a and the outside surface of a displacement bracket 18a that is fastened to the outer column 13a. When adjusting the forward-backward position of a steering wheel, the pivoting friction plate 25 for telescopic mechanism pivots around a support pin 33 as an adjustment rod 22a displaces along a long hole 19a for telescopic mechanism and a long guide hole 32.

A drilling control system monitors and compares drilling and completion operation sensor values and autonomously acts in response to conditions such as a kick or surge. Sensors in various combinations may monitor return fluid flow rate, fluid inflow rate, wellhead bore pressure, temperature of returning fluid, torque, rate of penetration and string weight change. The control system has corresponding control logic to monitor, warn and act based on the sensor inputs. The actions may include the warning of support personnel, closing an annular blowout preventer, shearing drill pipe using a ram shear, pumping heavier fluid down choke and kill lines, disconnecting the riser or various other actions.

A drilling apparatus for drilling boreholes in an underground formation includes a tool body that can be positioned in a borehole where drilling is to take place. The apparatus further includes a gas cutting torch having a nozzle, a supply of a cutting gas connected to the gas cutting torch. In some embodiments, the gas cutting torch and supply of cutting gas may be connected by an umbilical link. The tool body may be advanced through the borehole as drilling takes place. In some embodiments, the tool body may be advanced via a tractor device that forms part of the tool body or attached to the tool body.

The invention relates to a method and apparatus for opening threaded joints of drilling equipment (6) by striking the drilling equipment (6) with the percussion device of a rock drilling rig (1) and by measuring vibration originating from the drilling equipment (6) during striking. In addition to vibration, measuring means (9) measure a parameter defining at least one additional condition, on the basis of which the decision to stop striking is made.

In one aspect, an apparatus for drilling a wellbore into an earth formation is disclosed, which apparatus, according to one embodiment, may include a drill string configured to be conveyed into a wellbore, wherein an annulus is formed between the drill string and a wellbore wall, a first flow device configured to circulate a first fluid from an annulus to a bore of the drill string, and a second flow device positioned downhole of the first flow device, the second flow device configured to circulate a second fluid from the bore of the drill string to the annulus.

Apparatus and method for automated drilling of a borehole in a subsurface formation. In one embodiment, a method includes selecting at least one control variable. A drilling performance objective having a value that is influenced by drilling of the borehole using the at least one control variable is defined. A first interval of the borehole is drilled maintaining the at least one control variable at a first value. A second interval of the borehole is drilled maintaining the at least one control variable at a second value. A third interval of the borehole is drilled maintaining the at least one control variable at a third value. The third value is selected based on a comparison of the values of the drilling performance objective while drilling the first interval and second interval to a predetermined optimal value of the drilling performance objective.

Method and apparatus for controlling rock drilling with a percussion device belonging to a rock drill to deliver stress waves to rock through a tool by pushing the tool against the rock by means of a feed motor and rotating simultaneously the tool by means of a rotation motor, whereby the maximum feed force is determined, pressure medium is supplied to the feed motor and to the rotation motor and the feed force is controlled according to the drilling conditions. The feed force is controlled on the basis of the feed speed and the rotation torque. The apparatus has a load control valve which controls the feed.

A radiation detection apparatus according to an embodiment includes: a scintillator including a fluorescent material to convert radiation to visible radiation photon; a photon detection device array having a plurality of cells each of which includes a photon detection device to detect visible radiation photon emitted from a fluorescent material in the scintillator and convert the visible radiation photon to an electric signal; and a plurality of lenses provided on cells respectively in association with the cells to cause the visible radiation photon to be incident on the photon detection device in an associated cell.

Method for identifying CVD diamond comprises (1) placing a clean diamond on a fixed platform; (2) illuminating the diamond with light having various wavelengths; (3) receiving reflected light from the diamond; (4) calculating a reflectance value at each wavelength based on a light intensity at each wavelength of the reflected light, generating a spectral reflectance curve; (5) determining whether the spectral reflectance curve has a sharp trough, then storing the diamond if the spectral reflectance curve thereof does not have the sharp trough, while selecting the diamond for a further identification if the spectral reflectance curve thereof has the sharp trough; and (6) determining whether the sharp trough of the diamond selected from the step (5) is at a wavelength between 227 nm and 233 nm, and identifying the diamond to be the CVD diamond if the sharp trough is at the wavelength between 227 nm and 233 nm.

The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change relation between a combination of beams of the plurality of beams, and a target dose.

A method of bunch length compression method for a free electron laser (FEL) that avoids parasitic compressions by 1) applying acceleration on the falling portion of the RF waveform, 2) compressing using a positive momentum compaction (R56>0), and 3) compensating for aberration by using nonlinear magnets in the compressor beam line.

In a pattern inspection of a semiconductor circuit, to specify a cause of a process defect, not only a distribution on and across wafer of the number of defects but also more detailed, that is, the fact that how many defects occurred where on the semiconductor pattern is needed to be specified in some cases. Accordingly, the present invention aims to provide an apparatus capable of easily specifying a cause of a process defect based upon a positional relationship of a distribution of defect occurrence frequency and a pattern. The apparatus includes: a charged particle beam optical system for detecting secondary charged particles by irradiating the charged particle beam to the sample; an image processing unit for, based upon a plurality of images to be inspected that are obtained by the secondary charged particles, obtaining an occurrence frequency of defect candidates for each of predetermined regions inside the detected image; and a display unit for displaying the distribution of the occurrence frequency of the defect candidates so that a positional relationship to the pattern is recognized.

A chamber used in an extreme ultraviolet light generation apparatus that generates extreme ultraviolet light by irradiating a target material with a laser beam may include a chamber receptacle, a heat shield that is disposed within the chamber receptacle between a predetermined region where the target material turns into plasma and the chamber receptacle and that is configured to absorb heat produced at the predetermined region when the target material turns into plasma, and a support portion configured to attach the heat shield to the chamber receptacle, and further, the support portion may include an absorbing portion configured to absorb stress produced in the heat shield deforming due to the heat, by expanding/contracting in response to the thermal deformation of the heat shield.